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Cleanrooms

Facilities and Practices

  • M. Kozicki
  • S. Hoenig
  • P. Robinson

Table of contents

  1. Front Matter
    Pages i-x
  2. M. Kozicki, S. Hoenig, P. Robinson
    Pages 1-7
  3. M. Kozicki, S. Hoenig, P. Robinson
    Pages 8-24
  4. M. Kozicki, S. Hoenig, P. Robinson
    Pages 25-48
  5. M. Kozicki, S. Hoenig, P. Robinson
    Pages 49-79
  6. M. Kozicki, S. Hoenig, P. Robinson
    Pages 80-110
  7. M. Kozicki, S. Hoenig, P. Robinson
    Pages 111-129
  8. M. Kozicki, S. Hoenig, P. Robinson
    Pages 130-141
  9. M. Kozicki, S. Hoenig, P. Robinson
    Pages 142-161
  10. M. Kozicki, S. Hoenig, P. Robinson
    Pages 162-185
  11. M. Kozicki, S. Hoenig, P. Robinson
    Pages 186-210
  12. M. Kozicki, S. Hoenig, P. Robinson
    Pages 211-251
  13. M. Kozicki, S. Hoenig, P. Robinson
    Pages 252-292
  14. M. Kozicki, S. Hoenig, P. Robinson
    Pages 293-307
  15. Back Matter
    Pages 308-374

About this book

Introduction

In writing this book, our goal was to produce a much needed teaching and reference text with a fresh approach to c1eanroom technology. The most obvious technological reason for bringing this book into being is that c1ean­ rooms have become vital to the manufacture and development of high­ technology products in both the commercial and military sectors, and there­ fore people have to develop an understanding of them. Examples of c1ean­ room applications include the manufacture of integrated circuits and other electronic components, preciSion mechanical assemblies, computer disks and drives, compact disks, optical components, medical implants and prostheses, pharmaceuticals and biochemicals, and so on. The book is written for anyone who is currently involved, or intends to become involved, with c1eanrooms. We intend it to be used by a wide range of professional groups including process engineers, production engineers, plant mechanical and electrical engineers, research engineers and scientists, managers, and so on. In addition, we believe it will be beneficial to those who design, build, service, and supply c1eanrooms, and may be used as a training aid for students who intend to pursue a career involving controlled environments and others such as c1eanroom operators and maintenance staff. We have attempted to steer clear of complex theory, which may be pursued in many other specialist texts, and keep the book as understandable and applicable as possible.

Keywords

Gas Reer automation cleanroom cleanroom technology coating cooling heating manufacturing semiconductor semiconductor technology water

Authors and affiliations

  • M. Kozicki
    • 1
  • S. Hoenig
    • 2
  • P. Robinson
    • 3
  1. 1.Arizona State UniversityUSA
  2. 2.University of ArizonaUSA
  3. 3.Motorola, Inc.SPSUSA

Bibliographic information

  • DOI https://doi.org/10.1007/978-94-011-7950-8
  • Copyright Information Springer Science+Business Media B.V. 1991
  • Publisher Name Springer, Dordrecht
  • eBook Packages Springer Book Archive
  • Print ISBN 978-94-011-7952-2
  • Online ISBN 978-94-011-7950-8
  • Buy this book on publisher's site