Sensor Technology in the Netherlands: State of the Art

Proceedings of the Dutch Sensor Conference held at the University of Twente, The Netherlands, 2–3 March 1998

  • A. van den Berg
  • P. Bergveld
Conference proceedings

Table of contents

  1. Front Matter
    Pages i-xi
  2. Paul P. L. Regtien
    Pages 1-10
  3. Michiel de Bakker, Piet W. Verbeek, Gijs K. Steenvoorden
    Pages 11-16
  4. Ronald J. W. T. Tangelder, Hans G. Kerkhoff
    Pages 21-26
  5. R. Berger, H. P. Lang, C. Andreoli, J. Brügger, M. Despont, P. Vettiger et al.
    Pages 33-42
  6. B. G. de Grooth, A. Agronskaya, Bennink, S. J. T. van Noort, K. O. van der Werf, J. Greve
    Pages 43-48
  7. G. J. Veldhuis, P. V. Lambeck
    Pages 49-53
  8. U. A. Dauderstädt, P. J. French, P. M. Sarro
    Pages 55-60
  9. J. Flokstra, E. Bartolomé, G. K. van Ancum, M. J. van Duuren, H. Rogalla
    Pages 61-66
  10. Elisabeth Verpoorte
    Pages 67-75
  11. Yolanda Fintschenko, Albert van den Berg, Vincent Spiering, Gert-Jan Burger, Johannes van der Moolen
    Pages 77-84
  12. R. E. Oosterbroek, J. W. Berenschot, S. Schlautmann, T. S. J. Lammerink, A. van den Berg, M. C. Elwenspoek
    Pages 85-90
  13. Sebastian Böhm, Dorota Pijanowska, Wouter Olthuis, Piet Bergveld
    Pages 91-95
  14. Martijn M. G. Antonisse, Ronny J. W. Lugtenberg, Alina Ion, Richard J. M. Egberink, Bianca H. M. Snellink-Ruël, Johan F. J. Engbersen et al.
    Pages 97-105
  15. Niels J. van der Veen, Richard J. M. Egberink, Johan F. J. Engbersen, David N. Reinhoudt
    Pages 107-110
  16. Geert Besselink, Gijs Dirks, Wouter Olthuis, Piet Bergveld
    Pages 111-115
  17. Hans C. van Leeuwen, Peter C. van der Vliet, Richard B. M. Schasfoort
    Pages 117-121
  18. Simon Middelhoek
    Pages 123-132
  19. A. H. van Heeren, F. A. Pronk, C. W. M. P. Sillen, L. Postma
    Pages 133-138
  20. C. M. A. Ashruf, E. L. Oemar, P. J. French, P. M. Sarro, P. M. M. C. Bressers, J. J. Kelly
    Pages 139-142
  21. W. J. Kindt, H. W. van Zeijl
    Pages 143-146
  22. M. Bartek, S. H. Kong, R. F. Wolffenbuttel
    Pages 147-151
  23. G. R. Langereis, W. Olthuis, P. Bergveld
    Pages 153-157
  24. E. A. Dijkstra, W. Olthuis, J. Holsheimer, P. Bergveld
    Pages 159-164
  25. B. Jakoby, G. W. Lubking, M. J. Vellekoop
    Pages 165-170
  26. G. W. Lubking, B. Jakoby, M. J. Vellekoop
    Pages 171-177
  27. A. J. T. de Krijger, K. W. Benoist, J. A. G. van Bezooijen, H. H. P. Th. Bekman
    Pages 185-190
  28. Fabiano Fruett, Fredrik Creemer, Gerard C. M. Meijer, Paddy J. French
    Pages 191-195
  29. P. T. J. Gennissen, P. J. French
    Pages 197-199
  30. Hiroshi Ohji, Piet J. Trimp, Patrick J. French
    Pages 201-206
  31. Gijs Dirks, Geert Besselink, Wouter Olthuis, Piet Bergveld
    Pages 207-212
  32. A. Berthold, P. M. Sarro, M. J. Vellekoop
    Pages 213-217
  33. Hubertus F. M. Nelissen, Menno R. de Jong, Fokke Venema, Martinus C. Feiters, Roeland J. M. Nolte
    Pages 219-222
  34. Xiujun Li, Gerard C. M. Meijer
    Pages 223-227
  35. M. P. Brünner, M. Bartek, R. F. Wolffenbuttel
    Pages 235-240
  36. D. Wijngaards, M. Bartek, R. F. Wolffenbuttel
    Pages 241-246
  37. Paul R. van der Meer, Gerard C. M. Meijer, Michiel J. Vellekoop, Harry M. M. Kerkvliet, Ton J. J. van den Boom
    Pages 247-254
  38. Cristina Neagu, Henri Jansen, J. G. E. Gardeniers, Miko Elwenspoek
    Pages 255-261
  39. T. T. Veenstra, T. S. J. Lammerink, A. van den Berg, M. C. Elwenspoek
    Pages 263-267
  40. L. Vargas, G. C. S. Brons, B. Bouverat, J. Flokstra, H. Rogalla, G. Rietveld et al.
    Pages 275-280
  41. A. W. Hamster, M. J. van Duuren, G. C. S. Brons, J. Flokstra, H. Rogalla
    Pages 281-285
  42. Robert A. F. Zwijze, Remco J. Wiegerink, Theo S. J. Lammerink, Miko Elwenspoek
    Pages 287-292
  43. M. W. J. Beulen, F. C. J. M. van Veggel, D. N. Reinhoudt
    Pages 293-297
  44. Simon Flink, Frank C. J. M. van Veggel, David N. Reinhoudt
    Pages 299-304
  45. Jürgen H. Bügler, Menno de Jong, Johan F. J. Engbersen, David N. Reinhoudt
    Pages 305-309

About these proceedings


In the rapidly developing information society there is an ever-growing demand for information-supplying elements or sensors. The technology to fabricate such sensors has grown in the past few decades from a skilful activity to a mature area of scientific research and technological development. In this process, the use of silicon-based techniques has appeared to be of crucial importance, as it introduced standardized (mass) fabrication techniques, created the possibility of integrated electronics, allowed for new transduction principles, and enabled the realization of micromechanical structures for sensing or actuation. Such micromechanical structures are particularly well-suited to realize complex microsystems that improve the performance of individual sensors. Currently, a variety of sensor areas ranging from optical to magnetic and from micromechanical to (bio)chemical sensors has reached a high level of sophistication.
In this MESA Monograph the proceedings of the Dutch Sensor Conference, an initiative of the Technology Foundation (STW), held at the University of Twente on March 2-3, 1998, are compiled. It comprises all the oral and poster contributions of the conference, and gives an excellent overview of the state of the art of Dutch sensor research and development. Apart from Dutch work, the contributions of two external invited experts from Switzerland are included.


CMOS Multiplexer SQUID Sensor Standard Transistor electronics field-effect transistor integrated circuit ion-sensitive field effect transistor single-electron transistor static-induction transistor thin film

Editors and affiliations

  • A. van den Berg
    • 1
  • P. Bergveld
    • 1
  1. 1.MESA Research InstituteUniversity of TwenteThe Netherlands

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