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Physics of Collisional Plasmas

Introduction to High-Frequency Discharges

  • Michel Moisan
  • Jacques Pelletier

Table of contents

  1. Front Matter
    Pages I-XXIII
  2. Michel Moisan, Jacques Pelletier
    Pages 101-202
  3. Michel Moisan, Jacques Pelletier
    Pages 203-335
  4. Michel Moisan, Jacques Pelletier
    Pages 337-385
  5. Back Matter
    Pages 387-477

About this book

Introduction

The Physics of Collisional Plasmas deals with the plasma physics of interest to laboratory research and industrial applications, such as lighting, fabrication of microelectronics, destruction of greenhouse gases. Its emphasis is on explaining the physical mechanisms, rather than the detailed mathematical description and theoretical analysis. At the introductory level, it is important to convey the characteristic physical phenomena of plasmas, before addressing the ultimate formalism of kinetic theory, with its microscopic, statistical mechanics approach. To this aim, this text translates the physical phenomena into more tractable equations, using the hydrodynamic model; this considers the plasma as a fluid, in which the macroscopic physical parameters are the statistical averages of the microscopic (individual) parameters.

This book is an introduction to the physics of collisional plasmas, as opposed to plasmas in space. It is intended for graduate students in physics and engineering . The first chapter introduces with progressively increasing detail, the fundamental concepts of plasma physic. The motion of individual charged particles in various configurations of electric and magnetic fields is detailed in the second chapter while the third chapter considers the collective motion of the plasma particles described according to a hydrodynamic model. The fourth chapter is most original in that it introduces a general approach to energy balance, valid for all types of discharges comprising direct current(DC) and high frequency (HF) discharges, including an applied static magnetic field. The basic concepts required in this fourth chapter have been progressively introduced in the previous chapters.

The text is enriched with approx. 100 figures, and alphabetical index and 45 fully resolved problems. Mathematical and physical appendices provide complementary information or allow to go deeper in a given subject.

Keywords

Ambipolar diffusion regime Collisions in low-temperature plasmas Electron-cyclotron-resonance discharge Industrial applications of plasma discharges Introduction to cold plasmas Modeling of HF discharges Plasma discharges in the microelectronic industry Principles of plasma science and technology Textbook on plasma physics Wall-plasma interface

Authors and affiliations

  • Michel Moisan
    • 1
  • Jacques Pelletier
    • 2
  1. 1.Département de PhysiqueUniversity of MontrealMontrealCanada
  2. 2.Centr. de Rech. Plasmas-Mat.-Nanostruct.LPSCGrenobleFrance

Bibliographic information

  • DOI https://doi.org/10.1007/978-94-007-4558-2
  • Copyright Information Springer Science+Business Media Dordrecht 2012
  • Publisher Name Springer, Dordrecht
  • eBook Packages Physics and Astronomy
  • Print ISBN 978-94-007-4557-5
  • Online ISBN 978-94-007-4558-2
  • Buy this book on publisher's site