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Micro and Nano Fabrication

Tools and Processes

  • Hans H. Gatzen
  • Volker Saile
  • Jürg Leuthold

Table of contents

  1. Front Matter
    Pages i-xxvi
  2. Hans H. Gatzen, Volker Saile, Jürg Leuthold
    Pages 1-5
  3. Hans H. Gatzen, Volker Saile, Jürg Leuthold
    Pages 7-63
  4. Hans H. Gatzen, Volker Saile, Jürg Leuthold
    Pages 65-203
  5. Hans H. Gatzen, Volker Saile, Jürg Leuthold
    Pages 205-272
  6. Hans H. Gatzen, Volker Saile, Jürg Leuthold
    Pages 273-312
  7. Hans H. Gatzen, Volker Saile, Jürg Leuthold
    Pages 313-395
  8. Hans H. Gatzen, Volker Saile, Jürg Leuthold
    Pages 397-408
  9. Hans H. Gatzen, Volker Saile, Jürg Leuthold
    Pages 409-423
  10. Hans H. Gatzen, Volker Saile, Jürg Leuthold
    Pages 425-453
  11. Hans H. Gatzen, Volker Saile, Jürg Leuthold
    Pages 455-494
  12. Hans H. Gatzen, Volker Saile, Jürg Leuthold
    Pages 495-512
  13. Back Matter
    Pages 513-519

About this book

Introduction

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

Keywords

MEMS MNEMS Micro Electro-mechanical Systems NEMS Nano Electro-mechanical Systems Thin-film fabrication fabrication processes fabrication tools

Authors and affiliations

  • Hans H. Gatzen
    • 1
  • Volker Saile
    • 2
  • Jürg Leuthold
    • 3
  1. 1.Center for Production Technology Institute for Micro Production TechnologLeibniz Universität HannoverGarbsenGermany
  2. 2.KIT Division 5, Physics and MathematicsKarlsruhe Institute of TechnologyEggenstein-LeopoldshafenGermany
  3. 3.Institute of Electromagnetic FieldsETH ZurichZurichSwitzerland

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-662-44395-8
  • Copyright Information Springer-Verlag Berlin Heidelberg 2015
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Engineering
  • Print ISBN 978-3-662-44394-1
  • Online ISBN 978-3-662-44395-8
  • Buy this book on publisher's site
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