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Secondary Ion Mass Spectrometry SIMS II

Proceedings of the Second International Conference on Secondary Ion Mass Spectrometry (SIMS II) Stanford University, Stanford, California, USA August 27–31, 1979

  • A. Benninghoven
  • C. A. EvansJr.
  • R. A. Powell
  • R. Shimizu
  • H. A. Storms

Part of the Springer Series in Chemical Physics book series (CHEMICAL, volume 9)

Table of contents

  1. Front Matter
    Pages I-XIII
  2. Fundamentals

  3. Quantitation

  4. Semiconductors

  5. Static SIMS

    1. Front Matter
      Pages 115-115
    2. A. Benninghoven
      Pages 116-121
    3. David M. Hercules
      Pages 122-126
    4. S. Tamaki, A. Benninghoven, W. Sichtermann
      Pages 127-129
    5. R. J. Colton, J. D. Ganjei, J. S. Murday, J. J. De Corpo
      Pages 130-132
    6. S. Prigge, E. Bauer
      Pages 133-135
    7. P. Beckmann, K. H. Müller, M. Schemmer, A. Benninghoven
      Pages 136-138
  6. Metallurgy

    1. Front Matter
      Pages 145-145
    2. K. Tsunoyama, T. Suzuki, Y. Ohashi, H. Kishidaka
      Pages 146-150

About these proceedings

Keywords

Mass Spectrometry Massenspektrometrie

Editors and affiliations

  • A. Benninghoven
    • 1
  • C. A. EvansJr.
    • 2
  • R. A. Powell
    • 3
  • R. Shimizu
    • 4
  • H. A. Storms
    • 5
  1. 1.Physikalisches Institut der Universität MünsterGermany
  2. 2.Charles Evans & AssociatesSan MateoUSA
  3. 3.Varian AssociatesPalo AltoUSA
  4. 4.Osaka UniversityOsakaJapan
  5. 5.General Electric Vallecitos Nuclear CenterPleasantonUSA

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-642-61871-0
  • Copyright Information Springer-Verlag Berlin Heidelberg 1979
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-642-61873-4
  • Online ISBN 978-3-642-61871-0
  • Series Print ISSN 0172-6218
  • Buy this book on publisher's site
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