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  • © 1995

Vakuumbeschichtung

Verfahren und Anlagen

Part of the book series: VDI-Buch (VDI-BUCH)

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Table of contents (10 chapters)

  1. Front Matter

    Pages I-XIII
  2. Aufdampfen im Hochvakuum

    • G. Kienel, P. Sommerkamp
    Pages 20-106
  3. Ionenplattieren

    • H. Gärtner
    Pages 107-126
  4. Ionenzerstäubung von Festkörpern (Sputtering)

    • G. Kienel, H. Oechsner
    Pages 127-192
  5. Teilchenstrahlgestützte Verfahren

    • H. Oechsner, J. Waldorf, G. K. Wolf
    Pages 193-260
  6. Plasmabehandlungsmethoden

    • R. Grün, G. K. Wolf
    Pages 321-352
  7. Plasmaspritzen

    • E. Lugscheider, M. Knepper
    Pages 353-375
  8. Abscheidung aus der Gasphase

    • G. Wahl
    Pages 376-443
  9. Back Matter

    Pages 444-482

Bibliographic Information

  • Book Title: Vakuumbeschichtung

  • Book Subtitle: Verfahren und Anlagen

  • Authors: Uwe Behringer, Helmut Gärtner, Reinar Grün, Gerhard Kienel, Michael Knepper, Erich Lugscheider, Hans Oechsner, Georg Wahl, Jürgen Waldorf, Gerhard K. Wolf

  • Editors: Gerhard Kienel, Klaus Röll

  • Series Title: VDI-Buch

  • DOI: https://doi.org/10.1007/978-3-642-57905-9

  • Publisher: Springer Berlin, Heidelberg

  • eBook Packages: Springer Book Archive

  • Copyright Information: Springer-Verlag Berlin Heidelberg 1995

  • Hardcover ISBN: 978-3-540-62266-6Published: 13 December 1994

  • Softcover ISBN: 978-3-642-63398-0Published: 14 October 2012

  • eBook ISBN: 978-3-642-57905-9Published: 07 March 2013

  • Series ISSN: 2512-5281

  • Series E-ISSN: 2512-529X

  • Edition Number: 1

  • Number of Pages: XIII, 481

  • Topics: Manufacturing, Machines, Tools, Processes

Buy it now

Buying options

eBook USD 59.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book USD 74.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Other ways to access