Micromachines as Tools for Nanotechnology

  • Hiroyuki¬†Fujita

Part of the Microtechnology and MEMS book series (MEMS)

Table of contents

  1. Front Matter
    Pages I-XII
  2. Hiroyuki Fujita
    Pages 1-19
  3. Akira Mizuno
    Pages 45-81
  4. Patrick Degenaar, Eiichi Tamiya
    Pages 83-119
  5. Hiroyuki Fujita, Yasuo Wada, Dai Kobayashi, Gen Hashiguchi
    Pages 153-190

About this book


This book addresses the use of MEMS and micromachined devices for the investigation of nanoscience and technology, as well as biotechnology. Such micromachined tools for nanotechnology can enhance the sensitivity, spatial resolution, dexterity, selectivity, and parallel processing capability in measuring and manipulating nano-objects. The book covers state-of-the-art MEMS and NEMS devices for DNA molecular handling and analysis, cell handling and culture on a chip, chemical lab-on-a-chip, multi-probes for vacuum tunneling microscopy and AFM, and characterization of quantum semiconductor structures. Readers will gain deep insight into such developments and students will learn about the emerging field of MEMS and nanotechnology.


Technologie biotechnology development environment machine machining microelectromechanical system (MEMS) micromachining microsystems nanoscience nanostructure nanotechnology optics semiconductor technology

Editors and affiliations

  • Hiroyuki¬†Fujita
    • 1
  1. 1.Institute of Industrial ScienceThe University of TokyoTokyoJapan

Bibliographic information

  • DOI
  • Copyright Information Springer-Verlag Berlin Heidelberg 2003
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-642-62465-0
  • Online ISBN 978-3-642-55503-9
  • Series Print ISSN 1615-8326
  • Buy this book on publisher's site
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