Photomodulated Optical Reflectance

A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon

  • Janusz¬†Bogdanowicz

Part of the Springer Theses book series (Springer Theses)

Table of contents

  1. Front Matter
    Pages i-xxiii
  2. Janusz Bogdanowicz
    Pages 1-20
  3. Janusz Bogdanowicz
    Pages 21-37
  4. Janusz Bogdanowicz
    Pages 39-51
  5. Janusz Bogdanowicz
    Pages 115-139
  6. Janusz Bogdanowicz
    Pages 141-171
  7. Janusz Bogdanowicz
    Pages 173-178
  8. Back Matter
    Pages 179-201

About this book

Introduction

One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology. This work develops extensively all the fundamental physical models of the photomodulated optical reflectance technique and introduces novel approaches that extend its applicability from dose monitoring towards detailed carrier profile reconstruction. It represents a significant breakthrough in junction metrology with potential for industrial implementation.

Keywords

Dopant and Carrier Profiling Electrooptical and Electrothermal Effects Non-destructive Semiconductor Testing Ultra-shallow Junction Characterization carrier and Heat Transport in Highly Injected Semiconductors

Authors and affiliations

  • Janusz¬†Bogdanowicz
    • 1
  1. 1.University of LeuvenLeuvenBelgium

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-642-30108-7
  • Copyright Information Springer-Verlag Berlin Heidelberg 2012
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Physics and Astronomy
  • Print ISBN 978-3-642-30107-0
  • Online ISBN 978-3-642-30108-7
  • Series Print ISSN 2190-5053
  • Series Online ISSN 2190-5061
  • About this book
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