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  • © 2015

Handbook of Thin Film Technology

  • Serves as a practical handbook with a focus on the methods of thin film generation and measurement
  • Ideal for reference as well as for self-study
  • Includes an introduction to the physical foundations and applications in nanotechnology

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Table of contents (14 chapters)

  1. Front Matter

    Pages i-xiii
  2. Vacuum Evaporation

    • Hartmut Frey
    Pages 13-71
  3. Basic Principle of Plasma Physics

    • Hartmut Frey
    Pages 73-115
  4. Gaseous Phase and Surface Processes

    • Hartmut Frey
    Pages 117-132
  5. Cathode Sputtering

    • Hartmut Frey
    Pages 133-165
  6. Plasma Treatment Methods

    • Hartmut Frey
    Pages 167-179
  7. Particle Beam Sources

    • Hartmut Frey
    Pages 181-224
  8. Chemical Vapor Deposition (CVD)

    • Hartmut Frey
    Pages 225-252
  9. Insitu Measurements

    • Hartmut Frey
    Pages 279-299
  10. Measurements of Thin Layers After the Coating Process

    • Hartmut Frey, Thomas Helmut
    Pages 301-355
  11. Nanoparticle Films

    • Hamid R. Khan
    Pages 357-374
  12. Erratum to: Measurements of Thin Layers After the Coating Process

    • Hartmut Frey, Thomas Hellmuth
    Pages E1-E1
  13. Back Matter

    Pages 375-379

About this book

“Handbook of Thin Film Technology” covers all aspects of coatings preparation, characterization and applications. Different deposition techniques based on vacuum and plasma processes are presented. Methods of surface and thin film analysis including coating thickness, structural, optical, electrical, mechanical and magnetic properties of films are detailed described. The several applications of thin coatings and a special chapter focusing on nanoparticle-based films can be found in this handbook. A complete reference for students and professionals interested in the science and technology of thin films.

Editors and Affiliations

  • Esslingen, Germany

    Hartmut Frey

  • Schwäbisch Gmünd, Germany

    Hamid R. Khan

Bibliographic Information

Buy it now

Buying options

eBook USD 99.00
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book USD 129.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book USD 179.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Other ways to access