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Microstructuring of Glasses

  • Dagmar Hülsenberg
  • Alf Harnisch
  • Alexander Bismarck

Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 87)

Table of contents

  1. Front Matter
    Pages i-xx
  2. Fundamentals of Inorganic Nonmetallic Glasses and Glass Processing

  3. Geometrical Microstructuring of Glasses and Applications

  4. Back Matter
    Pages 295-323

About this book

Introduction

As microstructured glass becomes increasingly important for microsystems technology, the main application fields include micro-fluidic systems, micro-analysis systems, sensors, micro-actuators and implants. And, because glass has quite distinct properties from silicon, PMMA and metals, applications exist where only glass devices meet the requirements. The main advantages of glass derive from its amorphous nature, the precondition for its - theoretically - direction-independent geometric structurability. Microstructuring of Glasses deals with the amorphous state, various glass compositions and their properties, the interactions between glasses and the electromagnetic waves used to modify it. Also treated in detail are methods for influencing the geometrical microstructure of glasses by mechanical, chemical, thermal, optical, and electrical treatment, and the methods and equipment required to produce actual microdevices.

Keywords

Laser Laser treatment Microstructural glass devices Microstructuring of glasses Microsystems technology Photoform process glass

Authors and affiliations

  • Dagmar Hülsenberg
    • 1
  • Alf Harnisch
    • 2
  • Alexander Bismarck
    • 3
  1. 1.Technische Universität Ilmenau98693Germany
  2. 2.Silicaglas Ilmenau98704Germany
  3. 3.Department of Chemical Engineering Polymer and Composite Engineering Group (PaCE)Imperial College LondonSW7 2AZUK

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-540-49888-9
  • Copyright Information Springer Berlin Heidelberg 2008
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Physics and Astronomy
  • Print ISBN 978-3-540-26245-9
  • Online ISBN 978-3-540-49888-9
  • Series Print ISSN 0933-033X
  • Series Online ISSN 2196-2812
  • Buy this book on publisher's site
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