Editors:
- Written by the leading professionals in the field
- Highlights the basic physics as well as the technological aspects of the instrument
- Presents the relevant theoretical models and the corresponding software packages
- Describes real applications of the technique
- Includes supplementary material: sn.pub/extras
Part of the book series: NanoScience and Technology (NANO)
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Table of contents (19 chapters)
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Back Matter
About this book
Editors and Affiliations
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Inst. for Ion Beam Physics and Materials Research, Hemholtz-Zentrum Dresden-Rossendorf, Dresden, Germany
Gregor Hlawacek
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Physics of Supramolecular Systems and Surfaces, Bielefeld University, Bielefeld, Germany
Armin Gölzhäuser
Bibliographic Information
Book Title: Helium Ion Microscopy
Editors: Gregor Hlawacek, Armin Gölzhäuser
Series Title: NanoScience and Technology
DOI: https://doi.org/10.1007/978-3-319-41990-9
Publisher: Springer Cham
eBook Packages: Chemistry and Materials Science, Chemistry and Material Science (R0)
Copyright Information: Springer International Publishing Switzerland 2016
Hardcover ISBN: 978-3-319-41988-6Published: 12 October 2016
Softcover ISBN: 978-3-319-82473-4Published: 16 June 2018
eBook ISBN: 978-3-319-41990-9Published: 04 October 2016
Series ISSN: 1434-4904
Series E-ISSN: 2197-7127
Edition Number: 1
Number of Pages: XXIII, 526
Number of Illustrations: 116 b/w illustrations, 204 illustrations in colour
Topics: Spectroscopy and Microscopy, Surfaces and Interfaces, Thin Films, Surface and Interface Science, Thin Films, Nanotechnology and Microengineering
Industry Sectors: Chemical Manufacturing