Overview
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Table of contents (54 chapters)
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Thermal Oxidation Mechanisms and Modeling
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Novel Oxidation Methods and Characterization
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Deposition and Properties of SiO2
Keywords
About this book
Editors and Affiliations
Bibliographic Information
Book Title: The Physics and Chemistry of SiO2 and the Si-SiO2 Interface 2
Editors: C. Robert Helms, Bruce E. Deal
DOI: https://doi.org/10.1007/978-1-4899-1588-7
Publisher: Springer New York, NY
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eBook Packages: Springer Book Archive
Copyright Information: Springer Science+Business Media New York 1993
Hardcover ISBN: 978-0-306-44419-7Published: 30 September 1993
Softcover ISBN: 978-1-4899-1590-0Published: 19 November 2013
eBook ISBN: 978-1-4899-1588-7Published: 09 November 2013
Edition Number: 1
Number of Pages: XVI, 503
Topics: Electrochemistry, Physical Chemistry, Electrical Engineering, Optical and Electronic Materials
Industry Sectors: Chemical Manufacturing, Energy, Utilities & Environment