Authors:
- Discusses why semiconductor substrates are an excellent integration platform for making hybrid logic/sensor devices
- Provides a brief introduction to the methods accessible to non-experts, before going into details interesting to the experts
- Includes a detailed glossary explaining the specialized terminology and providing insight into the terminology and how it’s used
- Includes supplementary material: sn.pub/extras
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Table of contents (9 chapters)
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Front Matter
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Back Matter
About this book
Authors and Affiliations
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Department of Physics, The University of Texas at Austin, Austin, USA
Alexander A. Demkov, Agham B. Posadas
Bibliographic Information
Book Title: Integration of Functional Oxides with Semiconductors
Authors: Alexander A. Demkov, Agham B. Posadas
DOI: https://doi.org/10.1007/978-1-4614-9320-4
Publisher: Springer New York, NY
eBook Packages: Engineering, Engineering (R0)
Copyright Information: The Author(s) 2014
Hardcover ISBN: 978-1-4614-9319-8
Softcover ISBN: 978-1-4939-4169-8
eBook ISBN: 978-1-4614-9320-4
Edition Number: 1
Number of Pages: X, 278
Number of Illustrations: 33 b/w illustrations, 113 illustrations in colour
Topics: Electronics and Microelectronics, Instrumentation, Optical and Electronic Materials, Semiconductors
Industry Sectors: Aerospace, Automotive, Chemical Manufacturing, Electronics, Energy, Utilities & Environment, IT & Software, Materials & Steel, Telecommunications