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  • © 2014

Integration of Functional Oxides with Semiconductors

  • Discusses why semiconductor substrates are an excellent integration platform for making hybrid logic/sensor devices
  • Provides a brief introduction to the methods accessible to non-experts, before going into details interesting to the experts
  • Includes a detailed glossary explaining the specialized terminology and providing insight into the terminology and how it’s used
  • Includes supplementary material: sn.pub/extras

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Table of contents (9 chapters)

  1. Front Matter

    Pages i-x
  2. Introduction

    • Alexander A. Demkov, Agham B. Posadas
    Pages 1-24
  3. Critical Issues in Oxide-Semiconductor Heteroepitaxy

    • Alexander A. Demkov, Agham B. Posadas
    Pages 25-44
  4. Predictive Engineering of Semiconductor-Oxide Interfaces

    • Alexander A. Demkov, Agham B. Posadas
    Pages 45-61
  5. Crystalline Functional Oxide Growth Methods

    • Alexander A. Demkov, Agham B. Posadas
    Pages 63-87
  6. Thin Oxide Film Characterization Methods

    • Alexander A. Demkov, Agham B. Posadas
    Pages 89-114
  7. Growing SrTiO3 on Si (001) by Molecular Beam Epitaxy

    • Alexander A. Demkov, Agham B. Posadas
    Pages 115-158
  8. Integration of Functional Oxides on SrTiO3/Si Pseudo-Substrates

    • Alexander A. Demkov, Agham B. Posadas
    Pages 159-203
  9. Other Epitaxial Oxides on Semiconductors

    • Alexander A. Demkov, Agham B. Posadas
    Pages 205-233
  10. Outlook and Parting Thoughts

    • Alexander A. Demkov, Agham B. Posadas
    Pages 235-248
  11. Back Matter

    Pages 249-278

About this book

This book describes the basic physical principles of the oxide/semiconductor epitaxy and offers a view of the current state of the field. It shows how this technology enables large-scale integration of oxide electronic and photonic devices and describes possible hybrid semiconductor/oxide systems. The book incorporates both theoretical and experimental advances to explore the heteroepitaxy of tuned functional oxides and semiconductors to identify material, device and characterization challenges and to present the incredible potential in the realization of multifunctional devices and monolithic integration of materials and devices. Intended for a multidisciplined audience, Integration of Functional Oxides with Semiconductors describes processing techniques that enable atomic-level control of stoichiometry and structure and reviews characterization techniques for films, interfaces and device performance parameters. Fundamental challenges involved in joining covalent and ionic systems, chemical interactions at interfaces, multi-element materials that are sensitive to atomic-level compositional and structural changes are discussed in the context of the latest literature. Magnetic, ferroelectric and piezoelectric materials and the coupling between them will also be discussed. GaN, SiC, Si, GaAs and Ge semiconductors are covered within the context of optimizing next-generation device performance for monolithic device processing.

Authors and Affiliations

  • Department of Physics, The University of Texas at Austin, Austin, USA

    Alexander A. Demkov, Agham B. Posadas

Bibliographic Information

Buy it now

Buying options

eBook USD 84.99
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book USD 109.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book USD 109.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Other ways to access