Piezoresistor Design and Applications

  • Joseph C. Doll
  • Beth L. Pruitt

Part of the Microsystems and Nanosystems book series (MICRONANO, volume 1)

Table of contents

  1. Front Matter
    Pages i-xi
  2. Joseph C. Doll, Beth L. Pruitt
    Pages 1-20
  3. Joseph C. Doll, Beth L. Pruitt
    Pages 21-49
  4. Joseph C. Doll, Beth L. Pruitt
    Pages 51-83
  5. Joseph C. Doll, Beth L. Pruitt
    Pages 85-125
  6. Joseph C. Doll, Beth L. Pruitt
    Pages 127-148
  7. Joseph C. Doll, Beth L. Pruitt
    Pages 149-169
  8. Joseph C. Doll, Beth L. Pruitt
    Pages 171-194
  9. Back Matter
    Pages 195-245

About this book

Introduction

This book is a comprehensive guide to piezoresistive MEMS sensor design. Piezoresistors transduce mechanical loads into electrical signals via a resistance change, and comprise a substantial portion of the commercial MEMS sensors market. Applications of piezoresistors include strain gauges, accelerometers, pressure sensors, force sensors, chemical sensors and resonators.

This book also:

·         Demonstrates how the latest piezoresistor models and optimization techniques can be integrated for high performance piezoresistor design

·         Covers in detail piezoresistor sensitivity and noise models, signal conditioning, fabrication processes, low-power design and numerical optimization techniques

·         Provides an up-to-date discussion of alternative piezoresistive materials and MEMS transduction techniques

·         Explores in detail the tradeoffs in size, performance and complexity between piezoresistive sensing and popular alternatives (capacitive, piezoelectric and optical transduction)

Piezoresistor Design and Applications addresses all aspects of piezoresistor design, fabrication, modeling and optimization and is an ideal book for MEMS designers, process engineers and researchers.

Keywords

Convective Heat Transfer Design Optimization Heat Transfer Fundamentals Ion Implantation Lateral Dopant Diffusion Piezoresistance Fundamentals Piezoresistivity Piezoresistor Design Piezoresistor Surface Damage Thermomechanical Noise

Authors and affiliations

  • Joseph C. Doll
    • 1
  • Beth L. Pruitt
    • 2
  1. 1.Mechanical EngineeringStanford UniversityStanfordUSA
  2. 2.Mechanical EngineeringStanford UniversityStanfordUSA

Bibliographic information

  • DOI https://doi.org/10.1007/978-1-4614-8517-9
  • Copyright Information Springer Science+Business Media New York 2013
  • Publisher Name Springer, New York, NY
  • eBook Packages Engineering
  • Print ISBN 978-1-4614-8516-2
  • Online ISBN 978-1-4614-8517-9
  • About this book
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