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# Slow Rarefied Flows

## Theory and Application to Micro-Electro-Mechanical Systems

Provides an understanding of the essential mathematical tools required to deal with slow rarefied flows

Material can be used for a one-semester course or seminar

Gives the background for studies of the original literature

It is devised in such a way that certain parts can be skipped by readers interested in mathematical aspects and others by readers interested in applications.

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Part of the Progress in Mathematical Physics book series (PMP, volume 41)