Gettering Defects in Semiconductors

  • Victor A. Perevoschikov
  • Vladimir D. Skoupov

Part of the Springer Series in Advanced Microelectronics book series (MICROELECTR., volume 19)

About this book

Introduction

Gettering Defects in Semiconductors fulfills three basic purposes:

– to systematize the experience and research in exploiting various gettering techniques in microelectronics and nanoelectronics;

– to identify new directions in research, particularly to enhance the perspective of professionals and young researchers and specialists;

– to fill a gap in the contemporary literature on the underlying semiconductor-material theory.

The authors address not only well-established gettering techniques but also describe contemporary trends in gettering technologies from an international perspective. The types and properties of structural defects in semiconductors, their generating and their transforming mechanisms during fabrication are described. The primary emphasis is placed on classifying and describing specific gettering techniques, their specificity arising from both their position in a general technological process and the regimes of their application. This book addresses both engineers and material scientists interested in semiconducting materials theory and also undergraduate and graduate students in solid–state microelectronics and nanoelectronics. A comprehensive list of references provides readers with direction for further reading.

Keywords

Gettering Defects Gettering Techniques Microelectronic Technologies defects electronics material semiconductor

Authors and affiliations

  • Victor A. Perevoschikov
    • 1
  • Vladimir D. Skoupov
    • 1
  1. 1.Nizhny Novgorod State University after N.I. LobatchevskyNizhny NovgorodRussia

Bibliographic information

  • DOI https://doi.org/10.1007/3-540-29499-6
  • Copyright Information Springer Berlin Heidelberg 2005
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Chemistry and Materials Science
  • Print ISBN 978-3-540-26244-2
  • Online ISBN 978-3-540-29499-3
  • Series Print ISSN 1437-0387
  • About this book
Industry Sectors
Automotive
Chemical Manufacturing
Biotechnology
Electronics
Aerospace