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© 1999

High-Resolution X-Ray Scattering from Thin Films and Multilayers

  • Authors

Benefits

  • First monograph on thin-layer and multilayer x-ray analysis

  • Up-to-date review

  • Critical overview of the literature

Book

Part of the Springer Tracts in Modern Physics book series (STMP, volume 149)

About this book

Introduction

This critical overview presents experimental methods for solving most frequent strucutral problems of mono-crystalline thin films and layered systems:
thickness, crystalline state, strain distribution, interface quality and other properties. A unified theoretical approach based on kinematical and dynamical scattering theories describes the experimental methods. This book is a ready-to-hand reference for experimentalists who want to improve their knowledge on modern x-ray methods for thin-film analysis.

Keywords

Dispersion crystal diffraction lattice parameter scattering thin films

Bibliographic information

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