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Micro and Nano Machined Electrometers

  • Yong Zhu
Book
  • 352 Downloads

Table of contents

  1. Front Matter
    Pages i-v
  2. Jin Xie, Dongyang Chen
    Pages 1-42
  3. Chun Zhao, Huafeng Liu, Peiyi Song, Fangjing Hu
    Pages 43-81
  4. Imtiaz Ahmed, M. Fernando Gonzalez-Zalba
    Pages 83-128
  5. Yong Ruan, Jubayer Jalil, Yong Zhu
    Pages 155-181

About this book

Introduction

This book reviews advances in cutting-edge micro-/nano-electrometers, and discusses the technological challenges involved in their practical implementation. The detection of electrostatic charge has a wide range of applications in ionization chambers, bio-analyte and aerosol particle instruments, mass spectrometers, scanning tunneling microscopes, and even quantum computers. Designing micro-/nano-electrometers (also known as charge sensors) for electrometry is considered vital because of the charge sensitivity and resolution issues at micro-/nano-scales. The remarkably dynamic microelectromechanical systems (MEMSs)/nanoelectromechanical systems (NEMSs), and advances in solid-state electronics, hold considerable potential for the design and fabrication of extremely sensitive charge sensors.

Keywords

Mesoscopic SET electrometer NEMS electrometer MEMS electrometer Vibrating-reed electrometer charge sensors STM scanning tunneling microscopy single-electron transistor SET

Editors and affiliations

  • Yong Zhu
    • 1
  1. 1.School of Engineering and Built EnvironmentGriffith University, Gold Coast CampusSouthportAustralia

Bibliographic information

  • DOI https://doi.org/10.1007/978-981-13-3247-0
  • Copyright Information Springer Nature Singapore Pte Ltd. 2020
  • Publisher Name Springer, Singapore
  • eBook Packages Engineering
  • Print ISBN 978-981-13-3246-3
  • Online ISBN 978-981-13-3247-0
  • Buy this book on publisher's site
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