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3D TCAD Simulation for CMOS Nanoeletronic Devices

  • Yung-Chun Wu
  • Yi-Ruei Jhan

Table of contents

  1. Front Matter
    Pages i-xiii
  2. Yung-Chun Wu, Yi-Ruei Jhan
    Pages 1-17
  3. Yung-Chun Wu, Yi-Ruei Jhan
    Pages 19-90
  4. Yung-Chun Wu, Yi-Ruei Jhan
    Pages 91-183
  5. Yung-Chun Wu, Yi-Ruei Jhan
    Pages 185-210
  6. Yung-Chun Wu, Yi-Ruei Jhan
    Pages 211-236
  7. Yung-Chun Wu, Yi-Ruei Jhan
    Pages 237-255
  8. Yung-Chun Wu, Yi-Ruei Jhan
    Pages 257-278
  9. Back Matter
    Pages 305-330

About this book

Introduction

This book demonstrates how to use the Synopsys Sentaurus TCAD 2014 version for the design and simulation of 3D CMOS (complementary metal–oxide–semiconductor) semiconductor nanoelectronic devices, while also providing selected source codes (Technology Computer-Aided Design, TCAD). Instead of the built-in examples of Sentaurus TCAD 2014, the practical cases presented here, based on years of teaching and research experience, are used to interpret and analyze simulation results of the physical and electrical properties of designed 3D CMOSFET (metal–oxide–semiconductor field-effect transistor) nanoelectronic devices.

The book also addresses in detail the fundamental theory of advanced semiconductor device design for the further simulation and analysis of electric and physical properties of semiconductor devices. The design and simulation technologies for nano-semiconductor devices explored here are more practical in nature and representative of the semiconductor industry, and as such can promote the development of pioneering semiconductor devices, semiconductor device physics, and more practically-oriented approaches to teaching and learning semiconductor engineering. 

The book can be used for graduate and senior undergraduate students alike, while also offering a reference guide for engineers and experts in the semiconductor industry. Readers are expected to have some preliminary knowledge of the field.

Keywords

Semiconductor Design Textbook TCAD for Semiconductor Devices 3D Simulation of Semiconductor Processes Nanoeletronic Devices Simulation Analysis Nano-Semiconductor

Authors and affiliations

  • Yung-Chun Wu
    • 1
  • Yi-Ruei Jhan
    • 2
  1. 1.Dep. of Engi. and System Sci.National Tsing Hua University Hsinchu, TaiwanChina
  2. 2.National Tsing Hua UniversityDepartment of Engineering and System Sci National Tsing Hua UniversityHsinchuTaiwan

Bibliographic information

  • DOI https://doi.org/10.1007/978-981-10-3066-6
  • Copyright Information Springer Nature Singapore Pte Ltd. 2018
  • Publisher Name Springer, Singapore
  • eBook Packages Engineering
  • Print ISBN 978-981-10-3065-9
  • Online ISBN 978-981-10-3066-6
  • Buy this book on publisher's site
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