Tribology Issues and Opportunities in MEMS

Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS held in Columbus, Ohio, U.S.A., 9–11 November 1997

  • Bharat Bhushan
Conference proceedings

Table of contents

  1. Front Matter
    Pages i-xiv
  2. MEMS Fabrication Techniques

  3. MEMS Applications and Tribology Issues

    1. P. J. Hesketh, S. Zivanovic, S. Pak, B. Ilic, L. St. Clair, B. Shih et al.
      Pages 85-94
    2. S. M. Spearing, K. S. Chen
      Pages 95-107
  4. State-of-the-Art of Tribology: Macroscale Processes

    1. J. H. Tripp
      Pages 135-148
    2. N. S. Eiss
      Pages 149-156
    3. T. E. Fischer
      Pages 157-164
    4. F. J. Franklin, A. Kapoor
      Pages 165-174
    5. John A. Tichy
      Pages 175-183
    6. Hsing-Sen S. Hsiao, Bernard J. Hamrock, Shashi K. Sharma, John H. Tripp
      Pages 207-228
  5. State-of-the-Art of Tribology: Micro-to Nanoscale Processes

    1. J. Krim, M. Abdelmaksoud
      Pages 273-284
    2. Judith A. Harrison, Steven J. Stuart, Martin D. Perry
      Pages 285-299
    3. B. W. Chui, T. W. Kenny, H. J. Mamin, B. D. Terris, D. Rugar
      Pages 301-312
    4. Kenichiro Koga, X. C. Zeng, Dennis J. Diestler
      Pages 313-323
  6. Tribology of MEMS Components and Materials

    1. C. Thürigen, W. Ehrfeld, B. Hagemann, H. Lehr, F. Michel
      Pages 397-402
    2. Bharat Bhushan, Sriram Sundararajan, Xiaodong Li, Christian A. Zorman, Mehran Mehregany
      Pages 407-430
    3. Yury Gogotsi, Michael S. Rosenberg, Andreas Kailer, Klaus G. Nickel
      Pages 431-442
    4. V. Scherer, W. Arnold, B. Bhushan
      Pages 463-469
    5. Sumit Majumder, N. E. McGruer, Paul M. Zavracky, George G. Adams, Richard H. Morrison, Jacqueline Krim
      Pages 471-480
    6. Norm V. Gitis
      Pages 481-486
  7. Mechanical Property Measurements

    1. Paul H. Holloway, Jonathan Gorrell, Kenneth Shannon III
      Pages 509-518
    2. Christopher Muhlstein, Stuart Brown
      Pages 519-528
  8. Modification and Characterization of Surfaces

    1. Matthias Scherge, Juergen A. Schaefer
      Pages 529-537
    2. T. C. Ovaert, R. Messier, L. J. Pilione, R. Collins, J. Lee, W. Otaño-Rivera et al.
      Pages 567-578
    3. Z. Rymuza, Z. Kusznierewicz, M. Misiak, K. Schmidt-Szałowski, Z. Rżanek-Boroch, J. Sentek
      Pages 579-589
    4. V. V. Tsukruk, T. Nguyen, M. Lemieux, J. Hazel, W. H. Weber, V. V. Shevchenko et al.
      Pages 607-614
  9. Breakout Session Reports

About these proceedings


Micro Electro Mechanical Systems (MEMS) is already about a billion dollars a year industry and is growing rapidly. So far major emphasis has been placed on the fabrication processes for various devices. There are serious issues related to tribology, mechanics, surfacechemistry and materials science in the operationand manufacturingof many MEMS devices and these issues are preventing an even faster commercialization. Very little is understood about tribology and mechanical properties on micro- to nanoscales of the materials used in the construction of MEMS devices. The MEMS community needs to be exposed to the state-of-the-artoftribology and vice versa. Fundamental understanding of friction/stiction, wear and the role of surface contamination and environmental debris in micro devices is required. There are significantadhesion, friction and wear issues in manufacturing and actual use, facing the MEMS industry. Very little is understood about the tribology of bulk silicon and polysilicon films used in the construction ofthese microdevices. These issues are based on surface phenomenaand cannotbe scaled down linearly and these become increasingly important with the small size of the devices. Continuum theory breaks down in the analyses, e. g. in fluid flow of micro-scale devices. Mechanical properties ofpolysilicon and other films are not well characterized. Roughness optimization can help in tribological improvements. Monolayers of lubricants and other materials need to be developed for ultra-low friction and near zero wear. Hard coatings and ion implantation techniques hold promise.


Motor Potential Sensor integrated circuit machining manufacturing materials science microelectromechanical system (MEMS)

Editors and affiliations

  • Bharat Bhushan
    • 1
  1. 1.Computer Microtribology and Contamination Laboratory, Department of Mechanical EngineeringThe Ohio State UniversityColumbusUSA

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