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Molecular Beam Epitaxy and Heterostructures

  • Leroy L. Chang
  • Klaus Ploog

Part of the NATO ASI Series book series (NSSE, volume 87)

Table of contents

  1. Front Matter
    Pages i-viii
  2. Introduction

  3. Molecular Beam Epitaxy (MBE) Process

  4. Growth and Properties of Semiconductors

  5. Theory of Heterostructures

  6. Electronic Properties of Heterostructures

  7. Heterostructures Devices

  8. Alternative Epitaxy

    1. J. P. Duchemin, S. Hersee, M. Razeghi, M. A. Poisson
      Pages 677-719

About this book

Introduction

The NATO Advanced Study Institute on "Molecular Beam Epitaxy (MBE) and Heterostructures" was held at the Ettore Majorana Center for Scientific Culture, Erice, Italy, on March 7-19, 1983, the second course of the International School of Solid-State Device Re­ search. This volume contains the lectures presented at the Institute. Throughout the history of semiconductor development, the coupling between processing techniques and device structures for both scientific investigations and technological applications has time and again been demonstrated. Newly conceived ideas usually demand the ultimate in existing techniques, which often leads to process innova­ tions. The emergence of a process, on the other hand, invariably creates opportunities for device improvement and invention. This intimate relationship between the two has most recently been witnessed in MBE and heterostructures, the subject of this Institute. This volume is divided into several sections. Chapter 1 serves as an introduction by providing a perspective of the subject. This is followed by two sections, each containing four chapters, Chapters 2-5 addressing the principles of the MBE process and Chapters 6-9 describ­ ing its use in the growth of a variety of semiconductors and heteros­ tructures. The next two sections, Chapters to-II and Chapters 12-15, treat the theory and the electronic properties of the heterostructures, respectively. The focus is on energy quantization of the two­ dimensional electron system. Chapters 16-17 are devoted to device structures, including both field-effect transistors and lasers and detec­ tors.

Keywords

alloy dynamics semiconductors surface science thermodynamics

Editors and affiliations

  • Leroy L. Chang
    • 1
  • Klaus Ploog
    • 2
  1. 1.IBM T.J. Watson Research CenterYorktown HeightsUSA
  2. 2.Max-Planck-lnstituteStuttgart 80Germany

Bibliographic information

  • DOI https://doi.org/10.1007/978-94-009-5073-3
  • Copyright Information Springer Science+Business Media B.V. 1985
  • Publisher Name Springer, Dordrecht
  • eBook Packages Springer Book Archive
  • Print ISBN 978-94-010-8744-5
  • Online ISBN 978-94-009-5073-3
  • Series Print ISSN 0168-132X
  • Buy this book on publisher's site
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