© 2010

Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators

  • Evgeni Gusev
  • Eric Garfunkel
  • Arthur Dideikin
Conference proceedings

Table of contents

  1. Front Matter
    Pages i-x
  2. MEMS/NEMS Technologies and Applications

    1. Front Matter
      Pages 1-1
    2. Masayoshi Esashi
      Pages 31-40
    3. Nickolai Belov, Donald Adams, Peter Ascanio, Tsung-Kuan Chou, John Heck, Byong Kim et al.
      Pages 41-65
    4. Benedetto Vigna, Fabio Pasolini, Roberto de Nuccio, Macro Capovilla, Luciano Prandi, Fabio Biganzoli
      Pages 67-74
    5. Alexandru Müller, Dan Neculoiu, George Konstantinidis, Tauno Vähä-Heikilä
      Pages 75-87
    6. Joachim Oberhammer, Mikael Sterner, Nutapong Somjit
      Pages 89-100
  3. MEMS Device and Reliability Physics

  4. Advanced Processes and Materials

    1. Front Matter
      Pages 156-156
    2. H. Ashraf, J. Hopkins, L. M. Lea
      Pages 157-165
    3. Jyrki Kiihamäki, Hannu Kattelus, Martti Blomberg, Riikka Puurunen, Mari Laamanen, Panu Pekko et al.
      Pages 167-178
    4. Nils Hoivik, He Liu, Kaiying Wang, Guttorm Salomonsen, Knut Aasmundtveit
      Pages 179-190
    5. Maaike M. V. Taklo, Kari SchjøLberg-Henriksen, Nicolas Lietaer, Josef Prainsack, Anders Elfving, Josef Weber et al.
      Pages 191-203
    6. Guanxiong Liu, Qinghui Shao, Alexander A. Balandin, William Stillman, Michal Shur, Sergey Rumyantsev
      Pages 205-214

About these proceedings


A NATO Advanced Research Workshop (ARW) entitled “Advanced Materials and Technologies for Micro/Nano Devices, Sensors and Actuators” was held in St. Petersburg, Russia, from June 29 to July 2, 2009. The main goal of the Workshop was to examine (at a fundamental level) the very complex scientific issues that pertain to the use of micro- and nano-electromechanical systems (MEMS and NEMS), devices and technologies in next generation commercial and defen- related applications. Micro- and nano-electromechanical systems represent rather broad and diverse technological areas, such as optical systems (micromirrors, waveguides, optical sensors, integrated subsystems), life sciences and lab equipment (micropumps, membranes, lab-on-chip, membranes, microfluidics), sensors (bio-sensors, chemical sensors, gas-phase sensors, sensors integrated with electronics) and RF applications for signal transmission (variable capacitors, tunable filters and antennas, switches, resonators). From a scientific viewpoint, this is a very multi-disciplinary field, including micro- and nano-mechanics (such as stresses in structural materials), electronic effects (e. g. charge transfer), general electrostatics, materials science, surface chemistry, interface science, (nano)tribology, and optics. It is obvious that in order to overcome the problems surrounding next-generation MEMS/NEMS devices and applications it is necessary to tackle them from different angles: theoreticians need to speak with mechanical engineers, and device engineers and modelers to listen to surface physicists. It was therefore one of the main objectives of the workshop to bring together a multidisciplinary team of distinguished researchers.


CMOS integrated circuit metal microelectromechanical system (MEMS) semiconductor sensor static-induction transistor

Editors and affiliations

  • Evgeni Gusev
    • 1
  • Eric Garfunkel
    • 2
  • Arthur Dideikin
    • 3
  1. 1.Qualcomm MEMS Technologies, Inc.San JoseUSA
  2. 2.Inst. Advanced Materials Devices &, NanotechnologyRutgers UniversityPiscatawayUSA
  3. 3.A.E Ioffe Physico-Technical InstituteRussian Academy of SciencesSt. PetersburgRussian Federation

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