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Microtransducer CAD

Physical and Computational Aspects

  • Arokia Nathan
  • Henry Baltes

Part of the Computational Microelectronics book series (COMPUTATIONAL)

Table of contents

  1. Front Matter
    Pages I-XVIII
  2. Arokia Nathan, Henry Baltes
    Pages 1-29
  3. Arokia Nathan, Henry Baltes
    Pages 30-68
  4. Arokia Nathan, Henry Baltes
    Pages 69-103
  5. Arokia Nathan, Henry Baltes
    Pages 104-139
  6. Arokia Nathan, Henry Baltes
    Pages 140-201
  7. Arokia Nathan, Henry Baltes
    Pages 202-261
  8. Arokia Nathan, Henry Baltes
    Pages 262-315
  9. Arokia Nathan, Henry Baltes
    Pages 316-375
  10. Arokia Nathan, Henry Baltes
    Pages 376-419
  11. Back Matter
    Pages 420-427

About this book

Introduction

Computer-aided-design (CAD) of semiconductor microtransducers is relatively new in contrast to their counterparts in the integrated circuit world. Integrated silicon microtransducers are realized using microfabrication techniques similar to those for standard integrated circuits (ICs). Unlike IC devices, however, microtransducers must interact with their environment, so their numerical simulation is considerably more complex. While the design of ICs aims at suppressing "parasitic” effects, microtransducers thrive on optimizing the one or the other such effect. The challenging quest for physical models and simulation tools enabling microtransducer CAD is the topic of this book. The book is intended as a text for graduate students in Electrical Engineering and Physics and as a reference for CAD engineers in the microsystems industry.

Keywords

Monte Carlo Monte Carlo Simulation Sensor Standard circuit computer-aided design (CAD) electrical engineering integrated circuit material microstructures microsystems model modeling semiconductor simulation

Authors and affiliations

  • Arokia Nathan
    • 1
  • Henry Baltes
    • 2
  1. 1.Dept. of Electrical and Computer EngineeringUniversity of WaterlooWaterlooCanada
  2. 2.Physical Electronics LaboratoryETH HoenggerbergZürichSwitzerland

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-7091-6428-0
  • Copyright Information Springer-Verlag Vienna 1999
  • Publisher Name Springer, Vienna
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-7091-7321-3
  • Online ISBN 978-3-7091-6428-0
  • Series Print ISSN 0179-0307
  • Buy this book on publisher's site
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