Techniques and Principles

  • Maria Stepanova
  • Steven Dew

Table of contents

  1. Front Matter
    Pages i-viii
  2. Introduction

    1. Front Matter
      Pages 1-1
    2. Steven K. Dew, Maria Stepanova
      Pages 3-8
  3. Nanolithography

    1. Front Matter
      Pages 9-9
    2. Mohammad Ali Mohammad, Mustafa Muhammad, Steven K. Dew, Maria Stepanova
      Pages 11-41
    3. Emile van der Drift, Diederik J. Maas
      Pages 93-116
    4. Christophe Peroz, Vincent Reboud, Clivia M. Sotomayor Torres
      Pages 117-140
  4. Deposition at the Nanoscale

    1. Front Matter
      Pages 141-141
    2. A. Foroughi-Abari, K. Cadien
      Pages 143-161
    3. Richard L. McCreery, Adam Johan Bergren
      Pages 163-190
    4. E. Bhoje Gowd, Mallikarjuna Shroff Rama, Manfred Stamm
      Pages 191-216
  5. Nanoscale Etching and Patterning

    1. Front Matter
      Pages 237-237
    2. L. Nolan, K. Cadien
      Pages 239-274
    3. P. F. A. Alkemade, E. van Veldhoven
      Pages 275-300
    4. Robert Fedosejevs, Ying Tsui, Zhijiang Chen, Shyama Banerjee
      Pages 301-319

About this book


Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.


nanofabrication technologies nanolithography nanoscale patterns nanoscale structures nanotechnology

Editors and affiliations

  • Maria Stepanova
    • 1
  • Steven Dew
    • 2
  1. 1., National Research Council of CanadaNational Institute for NanotechnologyEdmontonCanada
  2. 2., Electrical and Computer EngineeringUniversity of AlbertaEdmontonCanada

Bibliographic information

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