Lock-in Thermography

Basics and Use for Functional Diagnostics of Electronic Components

  • Otwin Breitenstein
  • Martin Langenkamp

Part of the Springer Series in Advanced Microelectronics book series (MICROELECTR., volume 10)

Table of contents

  1. Front Matter
    Pages I-VIII
  2. Otwin Breitenstein, Martin Langenkamp
    Pages 1-5
  3. Otwin Breitenstein, Martin Langenkamp
    Pages 7-38
  4. Otwin Breitenstein, Martin Langenkamp
    Pages 39-67
  5. Otwin Breitenstein, Martin Langenkamp
    Pages 69-114
  6. Otwin Breitenstein, Martin Langenkamp
    Pages 115-141
  7. Otwin Breitenstein, Martin Langenkamp
    Pages 143-168
  8. Otwin Breitenstein, Martin Langenkamp
    Pages 169-172
  9. Back Matter
    Pages 173-194

About this book


The book deals with lock-in thermography as a special variant of the well known IR thermography for all applications where the heat of the sample can be pulsed. Compared to steady-state thermography, the lock-in mode enables a much improved signal/noise ratio (up to 1000x) by signal averaging, a far better lateral resolution, and it may provide inherent emissivity correction. Thus, it replaces thermal failure analysis previously carried out by using conventional IR microscopy, liquid crystal imaging, or fluorescent microthermal imaging. Various experimental approaches to lock-in thermography are reviewed with special emphasis on the systems developed by the authors themselves. Thus, the book provides a useful introduction to this technique and a helpful guide for scientists and engineers working in electronic device failure analysis. It concludes with a detailed theoretical treatment of the propagation of thermal waves, which is presented as a basis for various applications, e.g., integrated circuits, MOS structures, solar cells and solar modules.


Experiment Failure analysis Lifetime mapping Shunt imaging Solar cell characterization Trap density mapping basics imaging integrated circuit measurement microscopy thermography

Authors and affiliations

  • Otwin Breitenstein
    • 1
  • Martin Langenkamp
    • 1
  1. 1.Max-Planck-Institut für MikrostrukturphysikHalleGermany

Bibliographic information

  • DOI
  • Copyright Information Springer-Verlag Berlin Heidelberg 2003
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-642-07785-2
  • Online ISBN 978-3-662-08396-3
  • Series Print ISSN 1437-0387
  • Buy this book on publisher's site
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