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© 2018

Silicon Anodization as a Structuring Technique

Literature Review, Modeling and Experiments

Benefits

  • Study in technical sciences

Book
  • 1.8k Downloads

Table of contents

  1. Front Matter
    Pages I-XXIX
  2. Alexey Ivanov
    Pages 1-5
  3. Alexey Ivanov
    Pages 7-91
  4. Alexey Ivanov
    Pages 125-143
  5. Alexey Ivanov
    Pages 227-229
  6. Back Matter
    Pages 231-316

About this book

Introduction

Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.

Contents
  • Silicon Anodization: State of the Art
  • Experimental, Characterization and Simulation Methods
  • Microscale Study of Anodization Process
  • Anodization Process as a Structuring Technique: Experiments and Simulation
Target Groups

  • Researchers and students of microsystems technology, electrochemistry, microengineering
  • Practitioners in the area of microsystems, silicon processing and electrochemical material processing
<The Author
Alexey Ivanov
is currently working  as a research scientist at the Fraunhofer Institute for Solar Energy Systems (Fraunhofer ISE, Germany) on developing and optimizing anodization processes for large-scale fabrication of semiconductor photovoltaic cells and batteries.

Keywords

electrochemical etching microsystems FEM simulation microstructuring sacrificial layer electropolishing

Authors and affiliations

  1. 1.Fraunhofer ISEFreiburgGermany

About the authors

Alexey Ivanov is currently working  as a research scientist at the Fraunhofer Institute for Solar Energy Systems (Fraunhofer ISE, Germany) on developing and optimizing anodization processes for large-scale fabrication of semiconductor photovoltaic cells and batteries.

Bibliographic information

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