Laser-Assisted Microtechnology

  • Simeon M. Metev
  • Vadim P. Veiko

Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 19)

Table of contents

  1. Front Matter
    Pages I-XII
  2. Simeon M. Metev, Vadim P. Veiko
    Pages 1-5
  3. Simeon M. Metev, Vadim P. Veiko
    Pages 6-33
  4. Simeon M. Metev, Vadim P. Veiko
    Pages 34-99
  5. Simeon M. Metev, Vadim P. Veiko
    Pages 100-131
  6. Simeon M. Metev, Vadim P. Veiko
    Pages 132-156
  7. Simeon M. Metev, Vadim P. Veiko
    Pages 157-186
  8. Simeon M. Metev, Vadim P. Veiko
    Pages 187-227
  9. Simeon M. Metev, Vadim P. Veiko
    Pages 228-246
  10. Back Matter
    Pages 247-273

About this book


Laser-Assisted Microtechnology introduces the principles and techniques of laser-assisted microtechnology with emphasis on micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The experimental and theoretical physico-chemical basis of every technological process is presented in detail. On the basis of some characteristic examples of applications, the capabilities of the technological methods as well as the optimum conditions for their realization are discussed. In this second edition, besides the actualization of the literature, a new chapter concerning the laser-assisted wet chemical micro etching, has been added. This is a new method for direct 3D-micro structuring of solids, with a number of potential applications.


Laser Melting Laser Microtechnology Microprocessing Microtechnology Patterning deposition film laser machining micromachining thin films

Authors and affiliations

  • Simeon M. Metev
    • 1
  • Vadim P. Veiko
    • 2
  1. 1.BIAS Bremen Institute of Applied Beam TechnologyBremenGermany
  2. 2.IFMO Institute of Fine Mechanics and OpticsSt. PetersburgRussia

Bibliographic information

  • DOI
  • Copyright Information Springer-Verlag Berlin Heidelberg 1998
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-642-87273-0
  • Online ISBN 978-3-642-87271-6
  • Series Print ISSN 0933-033X
  • Series Online ISSN 2196-2812
  • Buy this book on publisher's site
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