Laser Processing of Thin Films and Microstructures

Oxidation, Deposition and Etching of Insulators

  • Ian W. Boyd

Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 3)

Table of contents

  1. Front Matter
    Pages I-VIII
  2. Ian W. Boyd
    Pages 1-14
  3. Ian W. Boyd
    Pages 15-99
  4. Ian W. Boyd
    Pages 100-133
  5. Ian W. Boyd
    Pages 134-189
  6. Ian W. Boyd
    Pages 190-208
  7. Ian W. Boyd
    Pages 209-235
  8. Ian W. Boyd
    Pages 236-271
  9. Ian W. Boyd
    Pages 272-286
  10. Back Matter
    Pages 287-320

About this book

Introduction

This text aims at providing a comprehensive and up to date treatment of the new and rapidly expanding field of laser pro­ cessing of thin films, particularly, though by no means exclu­ sively, of recent progress in the dielectrics area. The volume covers all the major aspects of laser processing technology in general, from the background and history to its many potential applications, and from the theory to the necessary experimental considerations. It highlights and compares the vast array of processing conditions now available with intense photon beams, as well as the properties of the films and microstructures pro­ duced. Separate chapters deal with the fundamentals of laser interactions with matter, and with experimental considerations. Detailed consideration is also given to film deposition, nuclea­ tion and growth, oxidation and annealing, as well as selective and localized. etching and ablation, not only in terms of the various photon-induced processes, but also with respect to traditional as well as other competing new technologies.

Keywords

Absorption Pet ablation adsorption experiment growth laser photon semiconductor structure thin films

Authors and affiliations

  • Ian W. Boyd
    • 1
  1. 1.Department of Electronic and Electrical EngineeringUniversity College LondonLondonUK

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-642-83136-2
  • Copyright Information Springer-Verlag Berlin Heidelberg 1987
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-642-83138-6
  • Online ISBN 978-3-642-83136-2
  • Series Print ISSN 0933-033X
  • Series Online ISSN 2196-2812
  • About this book
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