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Gate Dielectrics and MOS ULSIs

Principles, Technologies and Applications

  • Takashi¬†Hori

Part of the Springer Series in Electronics and Photonics book series (SSEP, volume 34)

Table of contents

  1. Front Matter
    Pages I-XIV
  2. Takashi Hori
    Pages 1-22
  3. Takashi Hori
    Pages 23-74
  4. Takashi Hori
    Pages 75-147
  5. Takashi Hori
    Pages 149-207
  6. Back Matter
    Pages 325-353

About this book

Introduction

Gate Dielectrics and MOS ULSIs provides necessary and sufficient information for those who wish to know well and go beyond the conventional SiO2 gate dielectric. The topics particularly focus on dielectric films satisfying the superior quality needed for gate dielectrics even in large-scale integration. And since the quality requirements are rather different between device applications, they are selected in an applicatipn-oriented manner, e.g., conventional SiO2 used in CMOS logic circuits, nitrided oxides, which recently became indispensable for flash memories, and composite ONO and ferroelectric films for passive capacitors used in DRAM applications. The book also covers issues common to all gate dielectrics, such as MOSFET physics, evaluation, scaling, and device application/integration for successful development. The information is as up to date as possible, especially for nanometer-range ultrathin gate-dielectric films indispensible in submicrometer ULSIs. The text together with abundant illustrations will take even the inexperienced reader up to the present high state of the art. It is the first book presenting nitrided gate oxides in detail.

Keywords

LSI MIS MOS dielectrics electron ferroelectrics hydrogen nitride oxide semiconductor spectroscopy

Authors and affiliations

  • Takashi¬†Hori
    • 1
  1. 1.Kyoto Research LaboratoryMatsushita Electronics, Inc.Minami-ku,KyotoJapan

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-642-60856-8
  • Copyright Information Springer-Verlag Berlin Heidelberg 1997
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-642-64587-7
  • Online ISBN 978-3-642-60856-8
  • Series Print ISSN 0172-5734
  • Buy this book on publisher's site
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