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Transducers ’01 Eurosensors XV

The 11th International Conference on Solid-State Sensors and Actuators June 10 – 14, 2001 Munich, Germany

  • Ernst Obermeier
Conference proceedings

Table of contents

  1. Front Matter
    Pages i-xxxii
  2. Plenary 1

    1. Front Matter
      Pages 1-1
    2. Martin A. Schmidt
      Pages 2-5
    3. Isao Shimoyama, Kazunori Hoshino, Yoshihiko Ozaki, Satoshi Tamaki, Shoji Takeuchi, Takashi Yasuda
      Pages 6-9
  3. Plenary 2

    1. Front Matter
      Pages 11-11
    2. J.-Uwe Meyer
      Pages 12-18
    3. Richard S. Muller
      Pages 20-23
  4. MEMS Power Generation

    1. Front Matter
      Pages 25-25
    2. Marc Strasser, Robert Aigner, Martin Franosch, Gerhard Wachutka
      Pages 26-29
    3. Samuel B. Schaevitz, Aleksander J. Franz, Klavs F. Jensen, Martin A. Schmidt
      Pages 30-33
    4. Chunbo Zhang, Khalil Najafi, Luis P. Bernal, Peter D. Washabaugh
      Pages 34-37
    5. Neil N. H. Ching, H. Y. Wong, Wen J. Li, Philip H. W. Leong, Zhiyu Wen
      Pages 38-41
    6. Kunihiko Izumida, Naoki Toyota, Masato Yoshimura, Yutatu Muroi, Tomohiko Takenaka, Kyoichi Ikeda
      Pages 42-45
    7. P. Glynne-Jones, S. P. Beeby, E. P. James, N. M. White
      Pages 46-49
  5. Integrated Systems

    1. Front Matter
      Pages 51-51
    2. R. Puers, W. Claes, W. Sansen, Michel De Cooman, J. Duyck, I. Naert
      Pages 52-55
    3. Hergen Kapels, Robert Aigner, Christian Kolle
      Pages 56-59
    4. Martin Handtmann, Robert Aigner, Andreas Meckes, Gerhard Wachutka
      Pages 64-67
    5. Kofi A. A. Makinwa, Johan H. Huijsing
      Pages 68-71
    6. Z. J. Davis, G. Abadal, B. Helbo, O. Hansen, F. Campabadal, F. Pérez-Murano et al.
      Pages 72-75
    7. Masahiko Takayama, Kazusuke Maenaka, Akihiro Yamamoto
      Pages 76-79
    8. Takayuki Fujita, Koji Inoue, Akira Tsuchitani, Shigeru Arita, Kazusuke Maenaka
      Pages 88-91
    9. Dieter Maier-Schneider, Stefan Kolb, Bernhard Winkler, Wolfgang Werner
      Pages 92-95
    10. Jeroen Bastemeijer, Wijnand Lubking, Frederic Laugere, Michiel Vellekoop
      Pages 100-103
    11. Jens Schröder, Ralf Borngräber, Frank Eichelbaum, Peter Hauptmann
      Pages 104-107
  6. Acoustic Sensors

    1. Front Matter
      Pages 109-109
    2. Meng-Nian Niu, Eun Sok Kim
      Pages 110-113
    3. Kaoru Yamashita, Hiroshi Katata, Masanori Okuyama, Hiromi Miyoshi, Genro Kato, Seiji Aoyagi et al.
      Pages 114-117
    4. Marc Füldner, A. Dehé, R. Aigner, T. Bever, R. Lerch
      Pages 126-129
    5. Kyutae Yoo, J.-L. A. Yeh, N. C. Tien, C. Gibbons, Q. Su, W. Cui et al.
      Pages 130-133
  7. Magnetic Sensors

    1. Front Matter
      Pages 135-135
    2. Michel Demierre, Sergio Pesenti, Javad Frounchi, P. A. Besse, R. S. Popovic
      Pages 136-139
    3. E. Schurig, M. Demierre, C. Schott, R. S. Popovic
      Pages 140-143
    4. C. Giebeler, J. J. M. Ruigrok, J. B. A. van Zon
      Pages 144-147
    5. Rahman A. Rub, Sukirti Gupta, Chong H. Ahn
      Pages 148-151
    6. Ch. Roumenin, D. Nikolov, A. Ivanov, C. Mihailova
      Pages 156-159
    7. Predrag M. Drljaca, Vincent Schlageter, Franck Vincent, Radivoje S. Popovic
      Pages 160-163
    8. Henry H. Yang, N. V. Myung, Jeffrey Yee, D.-Y. Park, B.-Y. Yoo, Morton Schwartz et al.
      Pages 164-167
    9. Mikael Lindeberg, Yvan Jaccard, Jean-Philippe Ansermet, Klas Hjort
      Pages 172-175
  8. Packaging & Wafer Bonding

    1. Front Matter
      Pages 177-177
    2. Gary Li, John Schmiesing, Andrew McNeil, Kevin Neumann, Bishnu Gogoi, Gordon Bitko et al.
      Pages 178-181
    3. Patty P. L. Chang-Chien, Kensall D. Wise
      Pages 182-185

About these proceedings

Introduction

The Conference is the premier international meeting for the presentation of original work addressing all aspects of the theory, design, fabrication, assembly, packaging, testing and application of solid-state sensors, actuators, MEMS, and microsystems.

Keywords

Biosensor Sensor electronics instrumentation measurement microelectromechanical system (MEMS) microelectronics microsystem microsystems sensors transducer

Editors and affiliations

  • Ernst Obermeier
    • 1
  1. 1.Department of Electrical Engineering & Computer Science Microsensor & Actuator Technology Secr.TIB 3.1Berlin University of TechnologyBerlinGermany

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-642-59497-7
  • Copyright Information Springer-Verlag Berlin Heidelberg 2001
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-540-42150-4
  • Online ISBN 978-3-642-59497-7
  • Buy this book on publisher's site
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