Vakuumbeschichtung

Anlagenautomatisierung — Meß- und Analysentechnik

  • Editors
  • Gerhard Kienel

Part of the VDI-Buch book series (VDI-BUCH)

Table of contents

  1. Front Matter
    Pages I-XII
  2. H. Birck, J. Moll
    Pages 1-33
  3. J. Bartella, E. Benes, R. Herrmann, G. Kienel, K. Röll, P. Sommerkamp
    Pages 34-106
  4. J. Bartella, R. Herrmann, G. Kienel, K. Röll, H. Wagner
    Pages 107-247
  5. J. Bartella, H. Hoffmann, K.-H. Müller, G. Reiss
    Pages 248-335
  6. Back Matter
    Pages 336-370

About this book

Keywords

Dickenmessverfahren Schichtdicke dünne Schichten

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-642-57904-2
  • Copyright Information VDI-Verlag GmbH. Düsseldorf 1994
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-642-63511-3
  • Online ISBN 978-3-642-57904-2
  • About this book
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