Handbook of Advanced Plasma Processing Techniques

  • Randy J. Shul
  • Stephen J. Pearton

Table of contents

  1. Front Matter
    Pages I-XVI
  2. E. Meeks, P. Ho
    Pages 69-121
  3. M. Meyyappan
    Pages 123-144
  4. G. A. Hebner, P. A. Miller, J. R. Woodworth
    Pages 145-204
  5. S. W. Pang
    Pages 309-360
  6. D. J. Resnick
    Pages 361-418
  7. C. Youtsey, I. Adesida
    Pages 459-505
  8. G. A. Vawter
    Pages 507-547
  9. S. Thomas III, J. J. Brown
    Pages 549-573
  10. K. B. Jung, H. Cho, S. J. Pearton
    Pages 607-647
  11. Back Matter
    Pages 649-655

About this book


This volume covers the topic of advanced plasma processing techniques, from the fundamental physics of plasmas to diagnostics, modeling and applications such as etching and deposition for microelectronics. The use of plasmas for patterning on a submicron scale has enabled successive generations of continually smaller transistors, lasers, micromachines, sensors and magnetic read/write heads that have formed the basis of our information age. This volume is the first to give coverage to this broad area of topics in a detailed fashion, especially in the rapidly expanding fields of micro-mechanical machines, photomask fabrication, magnetic data storage and reactor modeling. It provides the reader with a broad array of topics, authored by the leading experts in the field.


Plasma Sensor Technologie chemistry collision database development microelectromechanical system (MEMS) model modeling optimization physics plasma etching plasma processing quality

Editors and affiliations

  • Randy J. Shul
    • 1
  • Stephen J. Pearton
    • 2
  1. 1.Sandia National LaboratoriesAlbuquerqueUSA
  2. 2.Dept. Mat. Sci. Eng.University of FloridaGainesvilleUSA

Bibliographic information

  • DOI
  • Copyright Information Springer-Verlag Berlin Heidelberg 2000
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-642-63096-5
  • Online ISBN 978-3-642-56989-0
  • Buy this book on publisher's site
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