Nano-tribology and Materials in MEMS

  • Sujeet K. Sinha
  • N. Satyanarayana
  • Seh Chun Lim

Table of contents

  1. Front Matter
    Pages i-viii
  2. Biswajit Saha , Erjia Liu, Shu Beng Tor
    Pages 1-51
  3. Yufei Mo, Liping Wang
    Pages 81-110
  4. R. Arvind Singh, Eui-Sung Yoon, Kahp-Yang Suh, Deok-Ho Kim
    Pages 147-162
  5. Y. K. Yew, Z. C. Su, Sujeet K. Sinha, V. B. C. Tan
    Pages 163-181
  6. L. Dai, V. B. C. Tan
    Pages 183-198
  7. R. Arvind Singh, N. Satyanarayana, Sujeet K. Sinha
    Pages 215-229
  8. L. Y. Jonathan, V. Harikumar, N. Satyanarayana, Sujeet K. Sinha
    Pages 247-271
  9. Back Matter
    Pages 273-275

About this book


This book brings together recent developments in the areas of MEMS tribology, novel lubricants and coatings for nanotechnological applications, biomimetics in tribology and fundamentals of micro/nano-tribology. Tribology plays important roles in the functioning and durability of machines at small length scales because of the problems associated with strong surface adhesion, friction, wear etc. Recently, a number of studies have been conducted to understand tribological phenomena at nano/micro scales and many new tribological solutions for MEMS have been proposed.


MEMS Coatings Materials in Mems Micro-Tribology Nano-Lubricants Nanofriction SiO2/Si substrate Surface Forces

Editors and affiliations

  • Sujeet K. Sinha
    • 1
  • N. Satyanarayana
    • 2
  • Seh Chun Lim
    • 3
  1. 1.Department of Mechanical EngineeringIndian Institute of TechnologyKanpurIndia
  2. 2.Department of Mechanical EngineeringNational University of SingaporeSingaporeSingapore
  3. 3.Department of Mechanical EngineeringNational University of SingaporeSingaporeSingapore

Bibliographic information

  • DOI
  • Copyright Information Springer-Verlag Berlin Heidelberg 2013
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Engineering
  • Print ISBN 978-3-642-36934-6
  • Online ISBN 978-3-642-36935-3
  • Buy this book on publisher's site
Industry Sectors
Chemical Manufacturing
Energy, Utilities & Environment
Oil, Gas & Geosciences