Advertisement

© 2013

Multilayer Integrated Film Bulk Acoustic Resonators

  • The basic theory and design principles of Film Bulk Acoustic Resonators (FBARs)

  • An overview of FBAR filters by covering a vast range of technologies, optimal device design, filter topologies, packaging, fabrication processes, and high quality piezoelectric thin films

  • A practical guidance on integrating BAW filters in RF systems and advanced sensor arrays

Book

Table of contents

  1. Front Matter
    Pages i-x
  2. Yafei Zhang, Da Chen
    Pages 1-14
  3. Yafei Zhang, Da Chen
    Pages 15-29
  4. Yafei Zhang, Da Chen
    Pages 31-50
  5. Yafei Zhang, Da Chen
    Pages 51-69
  6. Yafei Zhang, Da Chen
    Pages 71-80
  7. Yafei Zhang, Da Chen
    Pages 81-95
  8. Yafei Zhang, Da Chen
    Pages 97-108
  9. Yafei Zhang, Da Chen
    Pages 109-124
  10. Yafei Zhang, Da Chen
    Pages 125-149
  11. Back Matter
    Pages 151-152

About this book

Introduction

Multilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices.

Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices.

Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang’s research group.

Keywords

Device Theory and Design Principle Film Bulk Acoustic Resonator Micro-nano Manufacturing Microelectronic Device Multilayer Integration Sensors and Actuators

Authors and affiliations

  1. 1.Research Inst. Micro/Nano, Science & TechnologyShanghai Jiao Tong UniversityShanghaiChina, People's Republic
  2. 2., Research Institute of Micro/Nano S&TShanghai Jiao Tong UniversityShanghaiChina, People's Republic

About the authors

Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology. He received his PhD in condensed physics from Lanzhou University of China in 1994. His expertise includes integrated circuits, sensors, field effect transistor construction, solar cells, synthesis and processing of carbon nanotubes, Si nanowires and SiC nanowhiskers, and nanodevices. He has 50 patents and has published 3 books and over 260 papers. He received the National Natural Science Award of China in 2005, and has held more than 20 invited talks at international conferences or institutions. He has also served on the organizing committee for 2 Journals.
Dr. Da Chen was a Ph.D. student in Prof. Yafei Zhang’s research group.

Bibliographic information

  • Book Title Multilayer Integrated Film Bulk Acoustic Resonators
  • Authors Yafei Zhang
    Da Chen
  • DOI https://doi.org/10.1007/978-3-642-31776-7
  • Copyright Information Shanghai Jiao Tong University Press, Shanghai and Springer-Verlag Berlin Heidelberg 2013
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Engineering Engineering (R0)
  • Hardcover ISBN 978-3-642-31775-0
  • Softcover ISBN 978-3-642-42755-8
  • eBook ISBN 978-3-642-31776-7
  • Edition Number 1
  • Number of Pages X, 154
  • Number of Illustrations 0 b/w illustrations, 0 illustrations in colour
  • Additional Information Jointly published with Shanghai Jiao Tong University Press, Shanghai
  • Topics Nanotechnology and Microengineering
    Surfaces and Interfaces, Thin Films
    Solid State Physics
  • Buy this book on publisher's site
Industry Sectors
Electronics
Engineering
Oil, Gas & Geosciences