About this book
Multilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices.
Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices.
Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang’s research group.
- DOI https://doi.org/10.1007/978-3-642-31776-7
- Copyright Information Shanghai Jiao Tong University Press, Shanghai and Springer-Verlag Berlin Heidelberg 2013
- Publisher Name Springer, Berlin, Heidelberg
- eBook Packages Engineering
- Print ISBN 978-3-642-31775-0
- Online ISBN 978-3-642-31776-7
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