Rare-Earth Implanted MOS Devices for Silicon Photonics

Microstructural, Electrical and Optoelectronic Properties

  • Lars Rebohle
  • Wolfgang Skorupa

Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 142)

Table of contents

  1. Front Matter
    Pages i-xviii
  2. Lars Rebohle, Wolfgang Skorupa
    Pages 1-4
  3. Lars Rebohle, Wolfgang Skorupa
    Pages 5-21
  4. Lars Rebohle, Wolfgang Skorupa
    Pages 23-52
  5. Lars Rebohle, Wolfgang Skorupa
    Pages 53-83
  6. Lars Rebohle, Wolfgang Skorupa
    Pages 85-116
  7. Lars Rebohle, Wolfgang Skorupa
    Pages 117-145
  8. Lars Rebohle, Wolfgang Skorupa
    Pages 147-157
  9. Back Matter
    Pages 159-173

About this book

Introduction

The book concentrates on the microstructural, electric and optoelectronic properties of rare-earth implanted MOS structures and their use as light emitters in potential applications. It describes the structural formation processes in the gate oxide during fabrication and under operation, how this microstructure development will affect the electrical device performance and how both microstructure and electrical characteristics determine the optoelectronic features of the light emitters. However, most of the discussed physical processes as well as the described fabrication methods and device characterization techniques are of general interest and are beyond the scope of this type of light emitter. The book will be of value to engineers, physicists, and scientists dealing either with Si based photonics in particular or optoelectronic device fabrication and characterization in general.

Keywords

Electroluminescence MOS technology Nanocluster formation Rare earth implantation Si-based light emission photonics

Authors and affiliations

  • Lars Rebohle
    • 1
  • Wolfgang Skorupa
    • 2
  1. 1.Dresden-Rossendorf e. V., Inst. Ionenstrahlphysik undForschungszentrumDresdenGermany
  2. 2.Dresden-Rossendorf e. V., Inst. Ionenstrahlphysik undForschungszentrumDresdenGermany

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-642-14447-9
  • Copyright Information Springer-Verlag Berlin Heidelberg 2010
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Physics and Astronomy
  • Print ISBN 978-3-642-14446-2
  • Online ISBN 978-3-642-14447-9
  • Series Print ISSN 0933-033X
  • Series Online ISSN 2196-2812
  • About this book
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