Design and Manufacturing of Active Microsystems

1. Microassembly

   1. Tools for Handling and Assembling of Microparts

      • B. Hoxhold, J. Wrege, S. Bütefisch, A. Burisch, A. Raatz, J. Hesselbach et al.

      Pages 287-308

   2. Stereophotogrammetry in Microassembly

      • C. Keck, M. Berndt, R. Tutsch

      Pages 309-326

   3. Use of Hot Melt Adhesives for the Assembly of Microsystems

      • G. Hemken, S. Böhm, K. Dilger

      Pages 327-343

   4. Design of a Microassembly Process Based on Hot Melt Adhesives

      • S. Rathmann, J. Ellwood, A. Raatz, J. Hesselbach

      Pages 345-364

   5. Design of an Automated Assembly for Micro and Nano Actuators

      • S. Rathmann, S. Hansen, A. Raatz, H. H. Gatzen

      Pages 365-371

2. Industrial Applications

   1. Front Matter

      Pages 373-373

      PDF

   2. Bistable Microvalve for Biomedical Usage

      • A. Balck, C. Kirsch, U. Schmid, H. Seidel, M. Leester-Schädel, S. Büttgenbach

      Pages 375-392

   3. Microassembly Following the Desktop Factory Concept

      • A. Burisch, S. Deumlich, R. Degen, A. Raatz, J. Hesselbach

      Pages 393-409

   4. Automated Optical BGA-Inspection – AUTOBIN

      • D. Gnieser, R. Tutsch

      Pages 411-422

   5. Slider with Integrated Microactuator (SLIM) for Second Stage Actuation in Hard Disk Drives

      • C. Ruffert, H. Saalfeld, H. H. Gatzen

      Pages 423-440

3. Back Matter

   Pages 441-444

   PDF

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.

• TCAD
• Technical CAD
• UV-depth lithography
• magnetic microsystems
• mechanical micromaching
• microactuators
• microassembly
• microelectroplating
• micrometrology
• micromotors
• microrobots
• microtribology
• miniaturized handling devices

• FB 7 Maschinenbau, LS Mikrotechnik, TU Braunschweig, Braunschweig, Germany

  Stephanus Büttgenbach

• Inst. Werkzeugmaschinen und, Fertigungstechnik, TU Braunschweig, Braunschweig, Germany

  Arne Burisch

• , Institut für Werkzeugmaschinen, Technische Universität Braunschweig, Braunschweig, Germany

  Jürgen Hesselbach

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