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Design and Manufacturing of Active Microsystems

  • Book
  • © 2011

Overview

Editors:
  1. Stephanus Büttgenbach

    1. FB 7 Maschinenbau, LS Mikrotechnik, TU Braunschweig, Braunschweig, Germany

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  2. Arne Burisch

    1. Inst. Werkzeugmaschinen und, Fertigungstechnik, TU Braunschweig, Braunschweig, Germany

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  3. Jürgen Hesselbach

    1. , Institut für Werkzeugmaschinen, Technische Universität Braunschweig, Braunschweig, Germany

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  • State-of-the-art design and application of electromagnetic microactuators
  • Newly developed microproduction technologies
  • Includes supplementary material: sn.pub/extras

Part of the book series: Microtechnology and MEMS (MEMS)

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Table of contents (24 chapters)

  1. Microassembly

    1. Tools for Handling and Assembling of Microparts

      • B. Hoxhold, J. Wrege, S. Bütefisch, A. Burisch, A. Raatz, J. Hesselbach et al.
      Pages 287-308

    2. Stereophotogrammetry in Microassembly

      • C. Keck, M. Berndt, R. Tutsch
      Pages 309-326

    3. Use of Hot Melt Adhesives for the Assembly of Microsystems

      • G. Hemken, S. Böhm, K. Dilger
      Pages 327-343

    4. Design of a Microassembly Process Based on Hot Melt Adhesives

      • S. Rathmann, J. Ellwood, A. Raatz, J. Hesselbach
      Pages 345-364

    5. Design of an Automated Assembly for Micro and Nano Actuators

      • S. Rathmann, S. Hansen, A. Raatz, H. H. Gatzen
      Pages 365-371

  2. Industrial Applications

    1. Front Matter

      Pages 373-373
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    2. Bistable Microvalve for Biomedical Usage

      • A. Balck, C. Kirsch, U. Schmid, H. Seidel, M. Leester-Schädel, S. Büttgenbach
      Pages 375-392

    3. Microassembly Following the Desktop Factory Concept

      • A. Burisch, S. Deumlich, R. Degen, A. Raatz, J. Hesselbach
      Pages 393-409

    4. Automated Optical BGA-Inspection – AUTOBIN

      • D. Gnieser, R. Tutsch
      Pages 411-422

    5. Slider with Integrated Microactuator (SLIM) for Second Stage Actuation in Hard Disk Drives

      • C. Ruffert, H. Saalfeld, H. H. Gatzen
      Pages 423-440

  3. Back Matter

    Pages 441-444
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Keywords

About this book

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.

Editors and Affiliations

  • FB 7 Maschinenbau, LS Mikrotechnik, TU Braunschweig, Braunschweig, Germany

    Stephanus Büttgenbach

  • Inst. Werkzeugmaschinen und, Fertigungstechnik, TU Braunschweig, Braunschweig, Germany

    Arne Burisch

  • , Institut für Werkzeugmaschinen, Technische Universität Braunschweig, Braunschweig, Germany

    Jürgen Hesselbach

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