© 2011

Design and Manufacturing of Active Microsystems

  • Stephanus Büttgenbach
  • Arne Burisch
  • Jürgen Hesselbach

Part of the Microtechnology and MEMS book series (MEMS)

Table of contents

  1. Front Matter
    Pages i-xii
  2. S. Büttgenbach, A. Burisch
    Pages 1-7
  3. Design and Construction

    1. Front Matter
      Pages 9-9
    2. G. Janssen, R. Gehrking, J. Edler, B. Ponick, H.-D. Stölting
      Pages 11-28
    3. V. Ganesan, K. Wiedmann, A. Beradinelli, S. Demmig, H.-D. Stölting, A. Mertens
      Pages 29-47
    4. U. Triltsch, U. Hansen, C. Boese, J. R. Ziebart, H.-J. Franke, T. Vietor et al.
      Pages 49-66
  4. Guiding and Measuring in Active Microsystems

    1. Front Matter
      Pages 67-67
    2. R. Bandorf, F. Pape, H. H. Gatzen, G. Bräuer
      Pages 69-88
    3. A. Phataralaoha, R. Bandorf, G. Bräuer, S. Büttgenbach
      Pages 89-108
    4. H. Kayapinar, H.-C. Möhring, B. Denkena
      Pages 109-126
    5. A. Kornfeld, C. Kolleck, A. Ostendorf
      Pages 127-144
    6. S. Bütefisch, U. Brand, L. Doering, G. Dai, L. Koenders, G. Wilkening
      Pages 145-164
  5. Manufacturing and Fabrication

    1. Front Matter
      Pages 165-165
    2. J. Chen, C. Ruffert, H. H. Gatzen, R. Bandorf, G. Bräuer
      Pages 167-188
    3. F. Pape, A. Waldschik, C. Ruffert, O. Traisigkhachol, M. Feldmann, T. Kohlmeier et al.
      Pages 189-206
    4. A. Waldschik, M. Feldmann, V. Seidemann, S. Büttgenbach
      Pages 207-224
    5. D. Hahmann, M. Rüggeberg, R. Wittmer, M. Reichstein, M. Hlavac, B. Denkena et al.
      Pages 245-266
  6. Microassembly

    1. Front Matter
      Pages 267-267
    2. J. Ellwood, A. Burisch, K. Schöttler, G. Pokar, A. Raatz, J. Hesselbach
      Pages 269-286

About this book


This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.


TCAD Technical CAD UV-depth lithography magnetic microsystems mechanical micromaching microactuators microassembly microelectroplating micrometrology micromotors microrobots microtribology miniaturized handling devices

Editors and affiliations

  • Stephanus Büttgenbach
    • 1
  • Arne Burisch
    • 2
  • Jürgen Hesselbach
    • 3
  1. 1.FB 7 Maschinenbau, LS MikrotechnikTU BraunschweigBraunschweigGermany
  2. 2.Inst. Werkzeugmaschinen und, FertigungstechnikTU BraunschweigBraunschweigGermany
  3. 3., Institut für WerkzeugmaschinenTechnische Universität BraunschweigBraunschweigGermany

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