Laser Precision Microfabrication

  • Koji Sugioka
  • Michel Meunier
  • Alberto Piqué

Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 135)

Table of contents

  1. Front Matter
    Pages i-xvi
  2. Razvan Stoian, Matthias Wollenhaupt, Thomas Baumert, Ingolf V. Hertel
    Pages 121-144
  3. Sébastien Besner, Michel Meunier
    Pages 163-187
  4. Wolfgang Kautek, Magdalena Forster
    Pages 189-213
  5. Koji Sugioka, Stefan Nolte
    Pages 215-238
  6. Jürgen Ihlemann
    Pages 239-257
  7. Oliver Suttmann, Anas Moalem, Rainer Kling, Andreas Ostendorf
    Pages 311-335
  8. Back Matter
    Pages 337-344

About this book


Miniaturization and high precision are rapidly becoming a requirement for many industrial processes and products. As a result, there is greater interest in the use of laser microfabrication technology to achieve these goals. This book composed of 16 chapters covers all the topics of laser precision processing from fundamental aspects to industrial applications to both inorganic and biological materials. It reviews the sate of the art of research and technological development in the area of laser processing.


Biomedical application Industrial application Laser microprocessing Nanomaterial cutting laser machining manufacturing nanotechnology simulation

Editors and affiliations

  • Koji Sugioka
    • 1
  • Michel Meunier
    • 2
  • Alberto Piqué
    • 3
  1. 1.Inst. of Phys.a.Chemical Res., Laser Technology LaboratoryRIKENWako-shi, SaitamaJapan
  2. 2.Department of Engineering Physics, Laser Processing LaboratoryÉcole Polytechnique MontréalMontrealCanada
  3. 3.Naval Research LaboratoryWashingtonUSA

Bibliographic information

Industry Sectors
Energy, Utilities & Environment