© 2008

Vacuum Technology

Practice for Scientific Instruments


Table of contents

  1. Front Matter
    Pages I-X
  2. Nagamitsu Yoshimura
    Pages 1-34
  3. Nagamitsu Yoshimura
    Pages 35-84
  4. Nagamitsu Yoshimura
    Pages 85-121
  5. Nagamitsu Yoshimura
    Pages 123-174
  6. Nagamitsu Yoshimura
    Pages 175-204
  7. Nagamitsu Yoshimura
    Pages 205-264
  8. Nagamitsu Yoshimura
    Pages 265-300
  9. Nagamitsu Yoshimura
    Pages 301-344
  10. Back Matter
    Pages 345-353

About this book


Nanotechnology has reached a level where almost every new development and even every new product uses features of nanoscopic properties of materials. As a consequence, an enormous amount of scientific instruments is used in order to synthesize and analyze new structures and materials. Due to the surface sensitivity of such materials, many of these instruments require ultrahigh vacuum that has to be provided under extreme conditions like very high voltages.

In this book, Yoshimura provides a review of the UHV related development during the last decades. His very broad experience in the design enables him to present us this detailed reference. After a general description how to design UHV systems, he covers all important issue in detail, like pumps, outgasing, Gauges, and Electrodes for high voltages.

Thus, this book serves as reference for everybody using UVH in his scientific equipment


Discharges Emitters Gauges Outgasing Pumps Simulation System Materials UHV System design development nanotechnology

Authors and affiliations

  1. 1.Kokubunji185-0031 Japan

Bibliographic information