Sputtering by Particle Bombardment

Experiments and Computer Calculations from Threshold to MeV Energies

  • Rainer Behrisch
  • Wolfgang Eckstein

Part of the Topics in Applied Physics book series (TAP, volume 110)

Table of contents

  1. Front Matter
    Pages I-XVII
  2. Rainer Behrisch, Wolfgang Eckstein
    Pages 1-20
  3. Wolfgang Eckstein, Herbert M. Urbassek
    Pages 21-31
  4. Wolfgang Eckstein
    Pages 33-187
  5. Herbert M. Urbassek
    Pages 189-230
  6. Wolfgang Jacob, Joachim Roth
    Pages 329-400
  7. Walter Assmann, Marcel Toulemonde, Christina Trautmann
    Pages 401-450
  8. Back Matter
    Pages 451-508

About this book

Introduction

This volume gives a comprehensive overview about the physical processes causing sputtering of solids at bombardment with energetic ions. The most important quantities are the sputtering yields, i.e. the average number of atoms eroded per incident ion. The latest results for the sputtering yields and their dependence on the incident energy and angle of incidence, as well as the energy and angular distributions of the sputtered atoms are presented. This concerns experimentally determined yields as well as a critical evaluation of the computational methods used to calculate the yields and distributions. The energies of the incident ions cover the range between a few eV up to several MeV. The influence of chemical effects between the incident ions and the atoms of the bombarded solid on the sputtering yields are also reviewed.

Keywords

Energie Helium-Atom-Streuung distribution dynamics ion sputtering particle bombardment plasma physics sputtering

Editors and affiliations

  • Rainer Behrisch
    • 1
  • Wolfgang Eckstein
    • 2
  1. 1.Max-Planck-Institut f\"ur PlasmaphysikGarchingGermany
  2. 2.Max-Planck-Institut f\"ur PlasmaphysikGarchingGermany

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-540-44502-9
  • Copyright Information Springer-Verlag Berlin/Heidelberg 2007
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Physics and Astronomy
  • Print ISBN 978-3-540-44500-5
  • Online ISBN 978-3-540-44502-9
  • Series Print ISSN 0303-4216
  • Series Online ISSN 1437-0859
  • About this book
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