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© 1998

Scanning Electron Microscopy

Physics of Image Formation and Microanalysis

  • Main benefit is information about the physics of image formation and microanalysis in scanning electron microscopy

  • 2nd, completely revised and updated edition

Book

Part of the Springer Series in Optical Sciences book series (SSOS, volume 45)

Table of contents

  1. Front Matter
    Pages I-XIV
  2. Ludwig Reimer
    Pages 1-12
  3. Ludwig Reimer
    Pages 57-134
  4. Ludwig Reimer
    Pages 171-205
  5. Ludwig Reimer
    Pages 207-251
  6. Ludwig Reimer
    Pages 289-328
  7. Ludwig Reimer
    Pages 329-377
  8. Ludwig Reimer
    Pages 379-447
  9. Back Matter
    Pages 449-529

About this book

Introduction

Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interations. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

Keywords

Rasterelektronen Mikroskopie Scanning Tunneling Microscopy crystal diffraction electron microscope electron microscopy electron optics microscopy optics scanning electron microscope

Authors and affiliations

  1. 1.Physikalisches InstitutWestfälische Wilhelms-Universität MünsterMünsterGermany

Bibliographic information

Reviews

"...this book is both linguistically and scientifically outstanding. It is an inspiring book for beginners and experienced SEM operators alike. The list of references is especially useful. This volume makes an outstanding contribution to the deeper understanding of the SEM."

T Mulvey, Measurement Science and Technology. 11, No12, December 2000