MEMS: A Practical Guide to Design, Analysis, and Applications

  • Jan G. Korvink
  • Oliver Paul

Table of contents

  1. Front Matter
    Pages i-xxv
  2. Oliver Paul
    Pages 1-51
  3. Osamu Tabata, Toshiyuki Tsuchiya
    Pages 53-92
  4. Jan G. Korvink, Evgenii B. Rudnyi, Andreas Greiner, Zhenyu Liu
    Pages 93-186
  5. Gary K. Fedder
    Pages 187-227
  6. Friedemann Vöelklein
    Pages 229-279
  7. Arokia Nathan, Karim S. Karim
    Pages 281-343
  8. Ming C. Wu, Pamela R. Patterson
    Pages 345-402
  9. Hans Zappe
    Pages 403-452
  10. Chavdar Roumenin
    Pages 453-521
  11. Franz Laermer
    Pages 523-566
  12. Andreas Hierlemann, Henry Baltes
    Pages 567-666
  13. Jens Ducrée, Peter Koltay, Roland Zengerle
    Pages 667-727
  14. Whye-Kei Lye, Michael Reed
    Pages 729-749
  15. Jack W. Judy
    Pages 751-803
  16. Paddy J. French, Pasqualina M. Sarro
    Pages 805-851
  17. Ulrike Wallrabe, Volker Salle
    Pages 853-899
  18. Piero Malcovati, Franco Maloberti
    Pages 901-942
  19. Back Matter
    Pages 943-965

About this book


MEMS are rapidly moving from the research laboratory to the mar­ ketplace. Many market studies indicate not only a tremendous market potential of MEMS devices; year by year we see the actual market grow as the technology matures. In fact, these days, many large silicon foundries have a MEMS group exploring this promising technology, including such giants as INTEL and Motorola. Yet MEMS are fundamentally different from microelectronics. This means that companies with an established track record in these branches need to adapt their skills, whereas companies that want to enter the "miniaturization" market need to establish an entirely new set of capabil­ ities. The same can be said of engineers with classical training, who will also need to be educated toward their future professional activity in the MEMS field. Here are some questions that a company or technologist may ask: I have an existing product with miniaturization market poten­ tial. Which technology should I adopt? What are the manufacturing options available for miniaturiza­ tion? What are the qualitative differences? How do we maintainamarketleadforproductsbased onMEMS? Is there CAD support?Can we outsource manufacturing? Which skills in our current capability need only adaptation? What skills need to be added? Professors Jan Korvink and Oliver Paul have set out to answer these questions in a form that addresses the needs of companies, commercial practitioners, and technologists.


Microelectromechanical Systems Micromachining Microtechnology Reference Sensor Standard microelectromechanical system (MEMS) microsystems optics production simulation

Editors and affiliations

  • Jan G. Korvink
    • 1
  • Oliver Paul
    • 1
  1. 1.Institute for Microsystem Technology IMTEKUniversity of FreiburgFreiburgGermany

Bibliographic information

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