© 2018

Optical Characterization of Thin Solid Films

  • Olaf Stenzel
  • Miloslav Ohlídal
  • Offers a sophisticated synthesis of fundamental and applied topics and a didactic presentation

  • Excellent interconnectedness of chapters through authors' belonging to collaborating working groups

  • Written by international top experts involved in industrial research and development


Part of the Springer Series in Surface Sciences book series (SSSUR, volume 64)

Table of contents

  1. Front Matter
    Pages i-xxiv
  2. Introduction and Modelling

    1. Front Matter
      Pages 1-1
    2. O. Stenzel, Miloslav Ohlídal
      Pages 3-10
    3. Daniel Franta, Jiří Vohánka, Martin Čermák
      Pages 31-82
    4. Pavel Ondračka, David Holec, Lenka Zajíčková
      Pages 83-104
  3. Spectrophotometry and Spectral Ellipsometry

    1. Front Matter
      Pages 105-105
    2. Miloslav Ohlídal, Jiří Vodák, David Nečas
      Pages 107-141
    3. Ivan Ohlídal, Jiří Vohánka, Martin Čermák, Daniel Franta
      Pages 233-267
  4. Characterization of Defective and Corrugated Coatings

    1. Front Matter
      Pages 269-269
    2. Ivan Ohlídal, Martin Čermák, Jiří Vohánka
      Pages 271-313
    3. Stefanie Kroker, Thomas Siefke
      Pages 341-358
    4. Thomas Siefke, Stefanie Kroker
      Pages 359-374
  5. Scatter and Absorption

    1. Front Matter
      Pages 375-375
    2. M. Trost, S. Schröder
      Pages 377-405

About this book


This book is an up-to-date survey of the major optical characterization techniques for thin solid films. Emphasis is placed on practicability of the various approaches. Relevant fundamentals are briefly reviewed before demonstrating the application of these techniques to practically relevant research and development topics. The book is written by international top experts, all of whom are involved in industrial research and development projects.


Optical Coating Characterization Optical Properties of Thin Solid Films Optical Constants Interface Spectroscopy Solid State Spectroscopy Spectroscopic Imaging Spectrophotometry

Editors and affiliations

  • Olaf Stenzel
    • 1
  • Miloslav Ohlídal
    • 2
  1. 1.Abbe School of PhotonicsFriedrich-Schiller-University JenaJenaGermany
  2. 2.Institute of Physical EngineeringBrno University of TechnologyBrnoCzech Republic

About the editors

Olaf Stenzel finished his diploma thesis in laser spectroscopy at the physics department of Moscow State University, Russia, in 1986. He received his PhD from Chemnitz University of Technology, Germany, in 1990 and habilitated there in 1999 in the field of optical properties of heterogeneous optical coatings. From 2001, he has worked at the Optical Coating Department of Fraunhofer Institute for Applied Optics and Precision Engineering IOF in Jena, Germany. There he worked for several years as  the group manager for optical coating characterization. He is the author of The Physics of Thin Film Optical Spectra: An Introduction, (Springer 2005, 2015) and Optical Coatings: Material Aspects in Theory and Practice, (Springer 2014). Currently his focus is on teaching at the Abbe School of Photonics at Friedrich Schiller Universität Jena, Germany, where he reads lectures on "Structure of Matter" and "Thin Film Optics" for master of photonics students. He is a member of OSA - The Optical Society.

Miloslav Ohlídal is a Professor of Applied Physics at the Brno University of Technology, Czech Republic. He was educated at the Masaryk University Brno, Czech Republic, where he received his RNDr. (1975) and Ph.D. (1989) degrees in Physics. From 1977-1981 he was a research worker at the Military Institute 060, where he dealt with military applications of lasers. Since 1981 he is engaged in the optical research at the Institute of Physical Engineering, Brno University of Technology. He directs the Laboratory of Coherent Optics. His research spans the various aspects of optics of thin films, laser light scattering, study of surface topography by optical methods, and optical instruments designing. Over the several past years his group has developed the technique of imaging spectroscopic reflectometry for optical characterization of thin films. He cooperates closely with industry. Prof. M. Ohlídal is a member of SPIE - The International Society for Optical Engineering, OSA-The Optical Society, and The Union of Czech Mathematicians and Physicists.

Bibliographic information

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