Helium Ion Microscopy

  • Gregor Hlawacek
  • Armin Gölzhäuser

Part of the NanoScience and Technology book series (NANO)

Table of contents

  1. Front Matter
    Pages i-xxiii
  2. Fundamentals

    1. Front Matter
      Pages 1-1
    2. John Notte, Jason Huang
      Pages 3-30
    3. Radovan Urban, Robert A. Wolkow, Jason L. Pitters
      Pages 31-61
    4. Ossi Lehtinen, Jani Kotakoski
      Pages 63-88
    5. Rajendra Timilsina, Philip D. Rack
      Pages 89-118
  3. Microscopy

    1. Front Matter
      Pages 147-147
    2. Stuart A. Boden
      Pages 149-172
    3. Armin Gölzhäuser, Gregor Hlawacek
      Pages 173-185
    4. Gregor Hlawacek, Vasilisa Veligura, Raoul van Gastel, Bene Poelsema
      Pages 205-224
    5. Armin Gölzhäuser
      Pages 225-244
    6. Yangbo Zhou, Daniel S. Fox, Hongzhou Zhang
      Pages 245-262
  4. Analysis

    1. Front Matter
      Pages 263-263
    2. Vasilisa Veligura, Gregor Hlawacek
      Pages 325-351
  5. Modification

    1. Front Matter
      Pages 353-353
    2. Ivan Shorubalko, Lex Pillatsch, Ivo Utke
      Pages 355-393
    3. Nima Kalhor, Paul F. A. Alkemade
      Pages 395-414
    4. Shane A. Cybart, Rantej Bali, Gregor Hlawacek, Falk Röder, Jürgen Fassbender
      Pages 415-445
    5. Shida Tan, Rick Livengood
      Pages 471-498
  6. Back Matter
    Pages 499-526

About this book


This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models and the existing simulation approaches are discussed in an extra section. The structure of the book allows the novice to get acquainted with the specifics of the technique needed to understand the more applied chapters in the second half of the volume. The expert reader will find a complete reference of the technique covering all important applications in several chapters written by the leading experts in the field. This includes imaging of biological samples, resist and precursor based nanofabrication, applications in semiconductor industry, using Helium as well as Neon and many more. The fundamental part allows the regular HIM user to deepen his understanding of the method. A final chapter by Bill Ward, one of the pioneers of HIM, covering the historical developments leading to the existing tool complements the content.


Atomic scale simulation of ion scattering Gas field ion source Helium ion microscopy High-resolution imaging Imaging of biological samples Ion Beam techniques Microscopy contrast formation Monte Carlo simulation of sputter yields Nanofabrication SIMS in HIM

Editors and affiliations

  • Gregor Hlawacek
    • 1
  • Armin Gölzhäuser
    • 2
  1. 1.Inst. for Ion Beam Physics and Materials ResearchHemholtz-Zentrum Dresden-RossendorfDresdenGermany
  2. 2.Physics of Supramolecular Systems and SurfacesBielefeld UniversityBielefeldGermany

Bibliographic information

  • DOI
  • Copyright Information Springer International Publishing Switzerland 2016
  • Publisher Name Springer, Cham
  • eBook Packages Chemistry and Materials Science
  • Print ISBN 978-3-319-41988-6
  • Online ISBN 978-3-319-41990-9
  • Series Print ISSN 1434-4904
  • Series Online ISSN 2197-7127
  • Buy this book on publisher's site
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