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Fundamentals of Nanomechanical Resonators

  • Silvan Schmid
  • Luis Guillermo Villanueva
  • Michael Lee Roukes

Table of contents

  1. Front Matter
    Pages i-viii
  2. Silvan Schmid, Luis Guillermo Villanueva, Michael Lee Roukes
    Pages 1-56
  3. Silvan Schmid, Luis Guillermo Villanueva, Michael Lee Roukes
    Pages 57-90
  4. Silvan Schmid, Luis Guillermo Villanueva, Michael Lee Roukes
    Pages 91-114
  5. Silvan Schmid, Luis Guillermo Villanueva, Michael Lee Roukes
    Pages 115-147
  6. Silvan Schmid, Luis Guillermo Villanueva, Michael Lee Roukes
    Pages 149-172
  7. Back Matter
    Pages 173-175

About this book

Introduction

This authoritative book introduces and summarizes the latest models and skills required to design and optimize nanomechanical resonators, taking a top-down approach that uses macroscopic formulas to model the devices. The authors cover the electrical and mechanical aspects of nano electromechanical system (NEMS) devices. The introduced mechanical models are also key to the understanding and optimization of nanomechanical resonators used e.g. in optomechanics.

Five comprehensive chapters address:

  • The eigenmodes derived for the most common continuum mechanical structures used as nanomechanical resonators;
  • The main sources of energy loss in nanomechanical resonators;
  • The responsiveness of micro and nanomechanical resonators to mass, forces, and temperature;
  • The most common underlying physical transduction mechanisms;
  • The measurement basics, including amplitude and frequency noise.

The applied approach found in this book is appropriate for engineering students and researchers working with micro and nanomechanical resonators.

Keywords

Resonance frequency Eigenmodes Continuum mechanical structures Vibrations Liquid damping Gas damping Clamping loss Intrinsic damping Frequency response Transduction Amplitude noise Frequency noise Nanomechanical sensing Resonator crystal Thermoelastic actuation String resonators Top-down fabrication

Authors and affiliations

  • Silvan Schmid
    • 1
  • Luis Guillermo Villanueva
    • 2
  • Michael Lee Roukes
    • 3
  1. 1.Vienna University of TechnologyWienAustria
  2. 2.École Polytechnique Fédérale deLausanneSwitzerland
  3. 3.California Institute of TechnologyPasadenaUSA

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-319-28691-4
  • Copyright Information Springer International Publishing Switzerland 2016
  • Publisher Name Springer, Cham
  • eBook Packages Engineering
  • Print ISBN 978-3-319-28689-1
  • Online ISBN 978-3-319-28691-4
  • Buy this book on publisher's site
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