Piezoelectric MEMS Resonators

  • Harmeet Bhugra
  • Gianluca Piazza

Part of the Microsystems and Nanosystems book series (MICRONANO)

Table of contents

  1. Front Matter
    Pages i-xii
  2. Materials for Piezoelectric MEMS Resonators

    1. Front Matter
      Pages 1-1
    2. Ronald G. Polcawich, Jeffrey S. Pulskamp
      Pages 39-71
    3. Mina Rais-Zadeh, Dana Weinstein
      Pages 73-98
    4. Songbin Gong
      Pages 99-129
  3. Design of Piezoelectric MEMS Resonators

    1. Front Matter
      Pages 131-131
    2. Reza Abdolvand, Hedy Fatemi, Sina Moradian
      Pages 133-152
    3. David Horsley, Yipeng Lu, Ofer Rozen
      Pages 153-173
    4. Ken-ya Hashimoto
      Pages 203-220
    5. D. T. Chang, D. J. Kirby
      Pages 221-242
    6. Mattan Kamon
      Pages 257-279
  4. Manufacturing and Reliability of Piezoelectric MEMS Resonators

  5. Real World Implementations

    1. Front Matter
      Pages 333-333
    2. Jan H. Kuypers
      Pages 335-385

About this book

Introduction

This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include:

  • Widely-used piezoelectric materials, as well as materials in which there is emerging interest
  • Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices
  • Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification
  • Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets
  • ...and more!

The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.

Keywords

AlN MEMS BAW piezoelectric resonators GaAs for MEMS GaN NEMS GaN Resonator MEMS Resonators PZT MEMS PiezoMEMS Resonators Piezoelectric MEMS pMEMS

Editors and affiliations

  • Harmeet Bhugra
    • 1
  • Gianluca Piazza
    • 2
  1. 1.MEMS DivisionEngineering Director, IDT Inc.San JoseUSA
  2. 2.Department of Electrical and Computer EngineeringCarnegie Mellon UniversityPittsburghUSA

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-319-28688-4
  • Copyright Information Springer International Publishing Switzerland 2017
  • Publisher Name Springer, Cham
  • eBook Packages Engineering
  • Print ISBN 978-3-319-28686-0
  • Online ISBN 978-3-319-28688-4
  • Series Print ISSN 2198-0063
  • Series Online ISSN 2198-0071
  • About this book
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