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Nanopositioning Technologies

Fundamentals and Applications

  • Changhai Ru
  • Xinyu Liu
  • Yu Sun

Table of contents

  1. Front Matter
    Pages i-vi
  2. Peng Pan, Feiyu Yang, Zhenhua Wang, Bowen Zhong, Lining Sun, Changhai Ru
    Pages 1-32
  3. Amro Shafik, Ridha Ben Mrad
    Pages 33-59
  4. Yuen Kuan Yong, Kam K. Leang
    Pages 61-121
  5. Zhuo Zhang, Yueqing Yu, Xinyu Liu, Xuping Zhang
    Pages 151-181
  6. Guo-Ying Gu, Li-Min Zhu, Chun-Yi Su, Han Ding
    Pages 183-212
  7. Kam K. Leang, Andrew J. Fleming
    Pages 213-244
  8. Andrew J. Fleming, Kam K. Leang
    Pages 245-294
  9. Jason J. Gorman
    Pages 295-324
  10. Y. Zhu, S. O. R. Moheimani, M. R. Yuce, A. Bazaei
    Pages 325-346
  11. Devin K. Luu, Chaoyang Shi, Yu Sun
    Pages 347-379
  12. Wenbo Zhang, Ming Pang, Changhai Ru
    Pages 381-409

About this book

Introduction

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

Keywords

Flexure-Guided Nanopositioning MEMS Nanopositioning Nanomanipulation Nanopositioning Applications Nanopositoning Technologies Nanopostioning Piezoelectric Actuation Piezoelectric Nanopositioning Tracking Control for Nanopositioning

Editors and affiliations

  • Changhai Ru
    • 1
  • Xinyu Liu
    • 2
  • Yu Sun
    • 3
  1. 1.Harbin Engineering UniversityHarbinChina
  2. 2.McGill University Mechanical EngineeringMontrealCanada
  3. 3.Univ Toronto Dept Electrical & ComputTorontoCanada

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-319-23853-1
  • Copyright Information Springer International Publishing Switzerland 2016
  • Publisher Name Springer, Cham
  • eBook Packages Engineering
  • Print ISBN 978-3-319-23852-4
  • Online ISBN 978-3-319-23853-1
  • Buy this book on publisher's site
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