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© 2014

Design, Modeling and Control of Nanopositioning Systems

Book

Part of the Advances in Industrial Control book series (AIC)

Table of contents

  1. Front Matter
    Pages i-xvi
  2. Andrew J. Fleming, Kam K. Leang
    Pages 1-15
  3. Andrew J. Fleming, Kam K. Leang
    Pages 17-41
  4. Andrew J. Fleming, Kam K. Leang
    Pages 43-55
  5. Andrew J. Fleming, Kam K. Leang
    Pages 57-102
  6. Andrew J. Fleming, Kam K. Leang
    Pages 103-153
  7. Andrew J. Fleming, Kam K. Leang
    Pages 155-174
  8. Andrew J. Fleming, Kam K. Leang
    Pages 175-219
  9. Andrew J. Fleming, Kam K. Leang
    Pages 221-249
  10. Andrew J. Fleming, Kam K. Leang
    Pages 251-273
  11. Andrew J. Fleming, Kam K. Leang
    Pages 275-298
  12. Andrew J. Fleming, Kam K. Leang
    Pages 299-316
  13. Andrew J. Fleming, Kam K. Leang
    Pages 317-336
  14. Andrew J. Fleming, Kam K. Leang
    Pages 337-393
  15. Andrew J. Fleming, Kam K. Leang
    Pages 395-408
  16. Back Matter
    Pages 409-411

About this book

Introduction

Covering the complete design cycle of nanopositioning systems, this is the first comprehensive text on the topic. The book first introduces concepts associated with nanopositioning stages and outlines their application in such tasks as scanning probe microscopy, nanofabrication, data storage, cell surgery and precision optics. Piezoelectric transducers, employed ubiquitously in nanopositioning applications are then discussed in detail including practical considerations and constraints on transducer response. The reader is then given an overview of the types of nanopositioner before the text turns to the in-depth coverage of mechanical design including flexures, materials, manufacturing techniques, and electronics. This process is illustrated by the example of a high-speed serial-kinematic nanopositioner. Position sensors are then catalogued and described and the text then focuses on control.

Several forms of control are treated: shunt control, feedback control, force feedback control and feedforward control (including an appreciation of iterative learning control). Performance issues are given importance as are problems limiting that performance such as hysteresis and noise which arise in the treatment of control and are then given chapter-length attention in their own right. The reader also learns about cost functions and other issues involved in command shaping, charge drives and electrical considerations. All concepts are demonstrated experimentally including by direct application to atomic force microscope imaging.

Design, Modeling and Control of Nanopositioning Systems will be of interest to researchers in mechatronics generally and in control applied to atomic force microscopy and other nanopositioning applications. Microscope developers and mechanical designers of nanopositioning devices will find the text essential reading.

Advances in Industrial Control aims to report and encourage the transfer of technology in control engineering. The rapid development of control technology has an impact on all areas of the control discipline. The series offers an opportunity for researchers to present an extended exposition of new work in all aspects of industrial control.

Keywords

Damping Control Feed Forward Control Flexure Design Hysteresis Nanopositioning Piezoelectric Actuators Position Sensors Precision Motion Control Scanning Probe Microscopes Tracking Control

Authors and affiliations

  1. 1.School of Engineering and Computer ScienceUniversity of NewcastleCallaghanAustralia
  2. 2.Mechanical EngineeringUniversity of Nevada, RenoRenoUSA

About the authors

The authors have twenty years combined experience in the design, fabrication and control of precision mechatronic systems. Dr. Fleming is a Senior Lecturer and Australian Research Fellow at the School of Electrical Engineering and Computer Science, The University of Newcastle, Australia. His research includes nanopositioning, sensors, atomic force microscopy and nanofabrication.
Dr. Leang, is an Associate Professor of Mechanical Engineering at the University of Nevada-Reno, Nevada. His research includes the modeling and control of piezo actuators for scanning probe microscopy, fabrication and control of electroactive polymers, and the design of microelectromechanical systems (MEMS) for nanotechnology.

Bibliographic information

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